Feasibility study of infrared waveguide device fabrication on the Cadmium zinc telluride (CZT) platform

碲化镉锌（CZT）平台红外波导器件制造的可行性研究

• 批准号: 486531-2015
• 负责人: Lu, Tao
• 金额: $ 1.82万
• 依托单位: University of Victoria
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=585662
• 关键词: Feasibility; study; infrared; waveguide; device

The nature of the work is to investigate the feasibility of fabricate infrared photonic devices on Redlen Technologies' novel Cadmium Zinc Tulluride (CZT) crystal based wafer which is known for its transparency over the infrared regime and ideal for making infrared waveguides, micro prisms, gratings and microcavities that could be used as building blocks for infrared photonic systems. Light at infrared range is widely used for remote sensing, tracking, imaging, spectroscopy and optical communication. Optical waveguide structure compatible at this wavelength will make the desirable device compact, sensitive and at low cost. In this proposal, the PI will investigate the feasibility of making photonic waveguide on CZT platform. We will focus on investigation to develop CZT wafer on silicon substrate to make our platform compatible with popular silicon photonic technologies. The etching processes to fabrication different waveguide structures on this platform will be investigated. Characterization of the optical properties of CZT based waveguide, such as scattering and bending loss of the fabricated waveguides in infrared region will be conducted. Our experiment results will be further compared with numerical simulations using the related software developed at the PI's research group for understanding the device behavior and optimizing the structures. The successful completion of the project may lead to future collaboration with Redlen on further development of photonic devices in the related applications based on the CZT platform. In the PI's view, the project is of important value to biologists and doctors where the CZT could potentially make more compact and sensitive sensing, imaging and spectroscopy systems. Such systems can easily be transform to monitor the atmospheric changes that is of vital interests to ecologists. Finally, the unique properties of CZT make it an intriguing platform for many applications in optical communication as well. These prospective, once verified can be achieved using Redlen's CZT platform through this collaboration, will place the company at the front line of the related market. The project will also help to train HQPs that are in demand for the related industry.

工作性质是研究在 Redlen 上制造红外光子器件的可行性 Technologies 的新型碲化镉锌 (CZT) 晶体晶片以其透明度而闻名 在红外范围内，非常适合制作红外波导、微棱镜、光栅和微腔 可以用作红外光子系统的构建模块。红外范围内的光广泛用于 遥感、跟踪、成像、光谱学和光通信。光波导结构 在此波长下兼容将使所需的设备紧凑、灵敏且成本低廉。在这个 根据提案，PI将研究在CZT平台上制作光子波导的可行性。我们将重点 正在研究开发硅衬底上的 CZT 晶圆，以使我们的平台兼容流行的 硅光子技术。在此基础上制作不同波导结构的蚀刻工艺 平台将被调查。基于 CZT 的波导的光学特性表征，例如 将进行所制作的波导在红外区域的散射和弯曲损耗。我们的实验 结果将进一步与使用 PI 开发的相关软件进行的数值模拟进行比较 研究小组了解设备行为并优化结构。顺利完成 该项目的进展可能会导致未来与 Redlen 合作进一步开发光子器件 基于CZT平台的相关应用。 PI认为该项目对生物学家具有重要价值 以及医生，CZT 可能会实现更紧凑、更灵敏的传感、成像和 光谱系统。此类系统可以轻松改造以监测至关重要的大气变化 生态学家的兴趣。最后，CZT 的独特属性使其成为许多人感兴趣的平台 在光通信方面也有应用。这些预期一旦得到验证就可以使用 Redlen 来实现 CZT平台通过此次合作，将使公司处于相关市场的前沿。这 项目还将有助于培训相关行业所需的总部人员。