Feasibility study of infrared waveguide device fabrication on the Cadmium zinc telluride (CZT) platform

本论文的主要工作是研究在红透镜上制作红外光子器件的可行性 Technologies的新型Tulluride锌镉（CZT）晶体基晶片，以其透明性而闻名 是制造红外波导、微棱镜、光栅和微腔的理想材料 可以用作红外光子系统的构建模块。红外范围的光被广泛用于 遥感、跟踪、成像、光谱学和光通信。光波导结构 在该波长下兼容将使所需的器件紧凑、灵敏且成本低。在这 根据提案，PI将研究在CZT平台上制作光子波导的可行性。我们将重点 研究在硅衬底上开发CZT晶片，使我们的平台与流行的 硅光子技术。在此基础上制作不同波导结构的刻蚀工艺 平台将进行调查。CZT基波导的光学特性的表征，例如 对制作的波导在红外区的散射和弯曲损耗进行了研究。我们的实验 研究结果将进一步与使用PI开发的相关软件进行的数值模拟进行比较 研究小组了解设备的行为和优化结构。圆满完成 该项目的实施可能会导致未来与Redlen合作，进一步开发光子器件， 基于CZT平台的相关应用。PI认为，该项目对生物学家具有重要价值， 和医生，CZT可能使更紧凑和敏感的传感，成像和 光谱系统这样的系统可以很容易地转换为监测大气变化，这是至关重要的 生态学家的兴趣。最后，CZT的独特属性使其成为许多人感兴趣的平台。 在光通信中也有应用。这些前瞻性，一旦验证可以实现使用Redlen的 CZT平台通过此次合作，将公司置于相关市场的第一线。的 该项目还将有助于培训相关行业所需的HQP。

The nature of the work is to investigate the feasibility of fabricate infrared photonic devices on Redlen Technologies' novel Cadmium Zinc Tulluride (CZT) crystal based wafer which is known for its transparency over the infrared regime and ideal for making infrared waveguides, micro prisms, gratings and microcavities that could be used as building blocks for infrared photonic systems. Light at infrared range is widely used for remote sensing, tracking, imaging, spectroscopy and optical communication. Optical waveguide structure compatible at this wavelength will make the desirable device compact, sensitive and at low cost. In this proposal, the PI will investigate the feasibility of making photonic waveguide on CZT platform. We will focus on investigation to develop CZT wafer on silicon substrate to make our platform compatible with popular silicon photonic technologies. The etching processes to fabrication different waveguide structures on this platform will be investigated. Characterization of the optical properties of CZT based waveguide, such as scattering and bending loss of the fabricated waveguides in infrared region will be conducted. Our experiment results will be further compared with numerical simulations using the related software developed at the PI's research group for understanding the device behavior and optimizing the structures. The successful completion of the project may lead to future collaboration with Redlen on further development of photonic devices in the related applications based on the CZT platform. In the PI's view, the project is of important value to biologists and doctors where the CZT could potentially make more compact and sensitive sensing, imaging and spectroscopy systems. Such systems can easily be transform to monitor the atmospheric changes that is of vital interests to ecologists. Finally, the unique properties of CZT make it an intriguing platform for many applications in optical communication as well. These prospective, once verified can be achieved using Redlen's CZT platform through this collaboration, will place the company at the front line of the related market. The project will also help to train HQPs that are in demand for the related industry.