Microfabrication Equipment for Magnetic Micro-Mechanical Structures

磁性微机械结构微加工设备

• 批准号: RTI-2017-00456
• 负责人: Diller, Eric
• 金额: $ 10.92万
• 依托单位: University of Toronto
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2016
• 资助国家: 加拿大
• 起止时间: 2016-01-01 至 2017-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=616680
• 关键词: Microfabrication; Equipment; Magnetic; Micro; Mechanical

The proposed research program involves an interdisciplinary team of four research groups, and aims to design and control a new class of active magnetic micro-scale robotic devices for research in medical robotics, basic cancer studies, tissue engineering and cell mechanobiology. Such a micro-robotic system is controlled and powered using a magnetic coil system capable of applying magnetic forces and moments remotely to sub-millimetre micro-fabricated devices. Micro-robot systems promise to provide unprecedented access to small confined spaces in a non-invasive manner due to their small size and capabilities for parallel or distributed operation. While we have shown the capability of basic magnetic micro-systems, we currently lack the proper tools to conduct the next stage of research in these four areas using magnetic microdevices. Such a lack of proper tools has prevented our groups from conducting the cutting-edge research we have planned in these areas. We urgently request new research equipment as outlined in this proposal to conduct the high-impact work. Specifically, we are requesting a maskless photolithography writing system for high-speed prototyping of microdevices, and a magnetizing system consisting of pulse magnetizer and magnetic characterization system to ensure precise magnetization of devices.

拟议的研究计划涉及一个由四个研究小组组成的跨学科团队，旨在设计和控制一类新的主动磁性微型机器人设备，用于医疗机器人，基础癌症研究，组织工程和细胞机械生物学研究。这样的微型机器人系统是使用磁线圈系统控制和供电的，该磁线圈系统能够远程地向亚毫米微型制造装置施加磁力和力矩。微型机器人系统由于其小尺寸和并行或分布式操作的能力，有望以非侵入性的方式提供对小的受限空间的前所未有的访问。虽然我们已经展示了基本磁性微系统的能力，但我们目前缺乏适当的工具来使用磁性微器件在这四个领域进行下一阶段的研究。由于缺乏适当的工具，我们的小组无法在这些领域进行我们计划的尖端研究。我们迫切需要本提案中概述的新研究设备，以开展影响力大的工作。具体而言，我们正在请求一个无掩模光刻写入系统，用于微型器件的高速原型制作，以及一个由脉冲磁化器和磁性表征系统组成的磁化系统，以确保器件的精确磁化。