Microfabrication Equipment for Magnetic Micro-Mechanical Structures

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The proposed research program involves an interdisciplinary team of four research groups, and aims to design and control a new class of active magnetic micro-scale robotic devices for research in medical robotics, basic cancer studies, tissue engineering and cell mechanobiology. Such a micro-robotic system is controlled and powered using a magnetic coil system capable of applying magnetic forces and moments remotely to sub-millimetre micro-fabricated devices. Micro-robot systems promise to provide unprecedented access to small confined spaces in a non-invasive manner due to their small size and capabilities for parallel or distributed operation. While we have shown the capability of basic magnetic micro-systems, we currently lack the proper tools to conduct the next stage of research in these four areas using magnetic microdevices. Such a lack of proper tools has prevented our groups from conducting the cutting-edge research we have planned in these areas. We urgently request new research equipment as outlined in this proposal to conduct the high-impact work. Specifically, we are requesting a maskless photolithography writing system for high-speed prototyping of microdevices, and a magnetizing system consisting of pulse magnetizer and magnetic characterization system to ensure precise magnetization of devices.