Vacuum polyradical deposition (VPRD) techniques for specialty nanoelectronics

用于特种纳米电子学的真空多自由基沉积 (VPRD) 技术

• 批准号: 506356-2017
• 负责人: Fanchini, Giovanni
• 金额: $ 15.04万
• 依托单位: University of Western Ontario
• 依托单位国家: 加拿大
• 项目类别: Strategic Projects - Group
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=642048
• 关键词: Vacuum; polyradical; deposition; VPRD; techniques

The Canadian plastics and polymer manufacturing sector is in need of a rejuvenation, while Canada'sinformation and communication technology (ICT) manufacturing is booming. Our 'big' data society and theprogress of ICT generate a continuous demand for new manufacturing solutions that, at the required levels ofthinness, simplicity, and costs, are not currently available from silicon electronics, and 'plastic' electronicsbased on organic polymers have often been suggested as promising alternative. This has created a pressingneed for the development of advanced, environmentally-friendly manufacturing methods for the production ofelectronic-grade 'plastic' materials. Polyradicals, polymers in which each repeated unit supports an unpairedelectron, are at the forefront of research in 'flash' memories, data storage units capable to retain informationwithout any external power source, but are writable an unlimited number of times. This proposal capitalizes onthe recent record achievement of the Fanchini-Gilroy team that has demonstrated and patented ultrathin flashmemory devices from a newly designed polyradical, poly[1,5-diisopropyl-3-(cis-5-norbornene-exo-2,3-dicarboxiimide)-6-oxo-verdazyl] (P6OV), with the thinnest active layer (10 nm) ever obtained, muchthinner than their commercial silicon counterparts. To capitalize on this startling discovery, an industriallyscalable system with the potential to lead to integrated electronics from organic polyradicals must beimplemented. In partnership with Plasmionique, Canada's largest producer of vacuum polymer depositionsystems for electronics , the Fanchini-Gilroy team will develop the prototype of a new vacuum polyradicaldeposition (VPRD) reactor that will be commercialized by our industrial partner, enabling solvent-free andenvironmentally-friendly mass production of polyradicals, with strong benefits to Canada. A prototype of aflash memory integrating a large number of memory components onto a single chip will also be demonstratedwith the new VPRD fabrication system, which will feature device patterning technology developed at theWestern University Nanofabrication Facility.

加拿大的塑料和聚合物制造业需要复兴，而加拿大的信息和通信技术（ICT）制造业正在蓬勃发展。我们的“大”数据社会和信息通信技术的进步产生了对新的制造解决方案的持续需求，在所需的薄度，简单性和成本水平上，硅电子产品目前无法提供，基于有机聚合物的“塑料”电子产品经常被认为是有前途的替代品。这就迫切需要开发先进的、环保的制造方法来生产电子级“塑料”材料。多自由基是一种聚合物，其中每个重复的单元支持一个不配对的电子，它处于“闪存”存储器研究的前沿，这种数据存储单元能够在没有任何外部电源的情况下保留信息，但可无限次写入。该提案利用了Fanchini-Gilroy团队最近的创纪录成就，他们展示了一种新设计的多自由基，聚[1,5-二异丙基-3-（顺-5-降冰片烯-外-2,3-二碳酰亚胺）-6-氧-甲醛]（P6OV）的超薄闪存器件，并获得了专利，该器件具有迄今为止最薄的活性层（10纳米），比商用硅薄得多。为了利用这一惊人的发现，必须实现一个具有工业可扩展性的系统，该系统具有从有机多自由基中产生集成电子器件的潜力。Fanchini-Gilroy团队将与加拿大最大的电子产品真空聚合物沉积系统生产商Plasmionique合作，开发一种新型真空聚自由基沉积（VPRD）反应器的原型，该反应器将由我们的工业合作伙伴商业化，实现无溶剂、环保的聚自由基大规模生产，为加拿大带来巨大利益。将大量存储组件集成到单个芯片上的闪存原型也将通过新的VPRD制造系统进行演示，该系统将采用西部大学纳米制造设施开发的器件图案技术。