Development of new technologies for the characterization of materials at high spatial resolution in field emission scanning electron microscopy

扫描电子显微镜（SEM）制造商不断提高扫描电子显微镜的性能，改进电子探测器并开发新的附件。要开启显微镜的新时代，缺少的是使用像日立加拿大这样的SEM制造商的新开发的新分析技术的应用和开发的例子。本CRD研究计划提出了具体的应用，通过结合申请人的专业知识和日立加拿大新的SEM能力和专业知识来改进和开发分析技术。该方案旨在解决四个问题：开发新型纳米材料的一个问题是准确地知道每个小特征的组成；利用纳米处理剂或纳米填充物（如碳纳米管）对生物和软质材料进行高分辨率成像和成分分析；表面污染和损坏观察材料的真实表面，使用任何可用的电子和x射线探测器来评估其微观结构；在实验过程中了解纳米材料的力学性能，即现场观察和表征。**展示了在中低加速电压下，采用配备新型环形探测器的自动闪光技术，可以在新型SU8230冷场扫描电镜上进行定量x射线微分析。(1)基于蒙特卡罗模拟非均质样品的SEM/STEM 30kv和低压体高分辨率x射线微分析新定量方法的开发。用于同时传输EBSD分析和定量x射线微分析的新型STEM样品支架的开发。(2)离子液体对这些材料进行高分辨率成像和定量x射线微分析的演示。(3)专家系统，优化使用平面离子磨粉机和臭氧清洗机。离子铣削系统制备用于STEM观测的薄膜。(4)基于LifeForce的纳米柱和纳米线的应力应变测量。LifeForce材料纳米压痕测量技术的发展。开发在sem内操作微米物体的应用实例。****

Scanning electron microscope (SEM) manufacturer continue to push the capability of the SEM, improve the electron detectors and develop novel attachments. What is missing to start a new era in microscopy are examples of application and development of new analysis techniques that use this new development from SEM manufacturer like Hitachi Canada. This CRD research proposal proposes specific applications, to improve and develop analysis techniques by combining the applicant expertise and Hitachi Canada new SEM capabilities and know-how. This proposal aim to address four problems: one problem of developing new nanoscale materials is to know accurately the composition of each small feature; high resolution imaging and composition analysis of biological and soft materials with nanoscale treating agents or nano-fillers like CNT; surface contamination and damage to observe the true surface of materials by using any of the available electron and x-ray detectors to assess their microstructure; understanding of the mechanical properties of nano-materials during the experiment, i.e., in-situ observation and characterization.**Project outline and goals**Demonstration that quantitative x-ray microanalysis is possible in the new SU8230 cold field SEM with the auto-flash technology equipped with the new annular detector at low and medium accelerating voltage. (1) Development of new quantitative methods for high resolution x-ray microanalysis in SEM/STEM 30 kV and low voltage bulk with Monte Carlo simulations for heterogeneous specimen. Development of a new STEM specimen holder for simultaneous transmission EBSD analysis and quantitative x-ray microanalysis. (2) Demonstration of high resolution imaging and quantitative x-ray microanalysis with these materials with ionic liquids. (3) Expert system for optimum use of Flat Ion Milling and Ozone cleaner. Preparation of thin films for STEM observation with the Ion Milling system. (4) Development stress-strain measurement of nanopilars and nanowires with the LifeForce. Development nano-indentation measurement of materials with LifeForce. Development of application example of manipulation of micrometer objects inside the SEM.****