Investigating the Potentials of A MEMS-based Sensory Platform Health Monitoring of Critical Systems

研究基于 MEMS 的传感平台关键系统健康监测的潜力

• 批准号: RGPIN-2015-04833
• 负责人: Moussa, Walid
• 金额: $ 2.11万
• 依托单位: University of Alberta
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=660362
• 关键词: Investigating; Potentials; MEMS; based; Sensory

The utilization of piezoresistivity (PR) in silicon has attracted many researchers to develop different types of sensing mechanisms for measuring physical phenomena such as deformation, stress, force and/or acceleration. Specifically, Micro and Nano Electro-mechanical Systems (MEMS/NEMS) PR has been utilized to develop external force and internal stress and strain sensors for applications in mining, oil and gas, aerospace, civil, electronic packaging, bio-mechanics, water flow and composite materials. Stress monitoring and analysis is considered a unique branch of engineering, which determines and improves the mechanical strength of structures and machines. With experimental stress analysis it is possible to know the stress distribution in a machine component in actual operation without knowing the applied forces acting on the part under these conditions, which is major improvement over analytical and numerical methods; and is essential for Structural Health Monitoring (SHM) involving potential damage detection and the following phases of condition-based maintenance and failure prevention of critical aging structures. Monitoring stresses and strains levels and internal forces are considered key performance parameters for the analysis of fatigue strength. Most available strain and force sensory are single direction and usually is combined with other sensors to allow for 2D (in-plane) measurements; resulting in a bigger footprint with low gauge factor. Achieving a three-dimensional (3D) strain or force sensing with typical sensory techniques requires even larger foot print with significant challenges in instrumentation. This proposal builds on our current breakthrough in achieving a 10-Element PR rosette capable of sensing the full stress picture in 3D. This MEMS based concept is based on manipulating the doping concentration over n-Si (1 1 1) plan to achieve a list of linear independent equation capable of detecting the in-plane and out of plane normal and shear stresses applied on the sensor chip; with the potential to be equipped with temperature compensation to operate accurately in tough environmental conditions. This proposal improves the fabrication of the 3D stress rosette to achieve higher sensitivity in out of plan normal stress and to enhance the signal to noise ratio achieved in other directions of the stresses. This will allow for the rosette to be used further as the backbone substrate to improve another technology of our team, a 3D load sensor platform, which has the potential to be used in various tactile and consumer electronics applications. The use of high gauge factor MEMS--based PR in building our 3D stress and load sensory platforms allow it to be optimum approach to increase its sensitivity level while using less energy to operate; which is a need in many remote sensing wireless systems and consumer electronics applications, such as smart touch screen and phones. **

硅中压阻效应的利用吸引了许多研究人员开发不同类型的传感机制，用于测量诸如变形、应力、力和/或加速度等物理现象。具体而言，微纳机电系统（MEMS/NEMS）PR已被用于开发外力和内应力和应变传感器，用于采矿，石油和天然气，航空航天，民用，电子封装，生物力学，水流和复合材料。应力监测和分析被认为是工程学的一个独特的分支，它确定并提高了结构和机器的机械强度。通过实验应力分析，可以在不知道这些条件下作用在零件上的作用力的情况下了解实际操作中机器部件的应力分布，这是对分析和数值方法的重大改进;并且对于结构健康监测（SHM）至关重要，包括潜在损伤检测和关键老化结构的基于状态的维护和故障预防的后续阶段。监测应力和应变水平以及内力被认为是疲劳强度分析的关键性能参数。大多数可用的应变和力传感器都是单向的，通常与其他传感器结合使用，以实现2D（平面内）测量;这导致了更大的占地面积和更低的应变系数。用典型的传感技术实现三维（3D）应变或力感测需要更大的占地面积，这在仪器方面具有重大挑战。该提案建立在我们目前在实现能够以3D方式感测完整应力图片的10元素PR玫瑰花结方面的突破之上。这种基于MEMS的概念基于操纵n-Si（111）平面上的掺杂浓度以实现能够检测施加在传感器芯片上的面内和面外法向应力和剪切应力的线性独立方程的列表;具有配备温度补偿以在坚韧环境条件下准确操作的潜力。该提案改进了3D应力花的制作，以在平面外法向应力中实现更高的灵敏度，并增强在其他应力方向上实现的信噪比。这将使玫瑰花结进一步用作骨干基板，以改进我们团队的另一项技术，即3D载荷传感器平台，该平台有可能用于各种触觉和消费电子应用。在构建我们的3D应力和负载传感平台时使用基于MEMS的高应变系数PR，使其成为提高其灵敏度水平的最佳方法，同时使用更少的能量进行操作;这是许多遥感无线系统和消费电子应用（如智能触摸屏和手机）的需求。 **