MEMS passive strain recorders/counters

MEMS 无源应变记录仪/计数器

• 批准号: RGPIN-2016-04313
• 负责人: Hubbard, Ted
• 金额: $ 1.89万
• 依托单位: Dalhousie University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2019
• 资助国家: 加拿大
• 起止时间: 2019-01-01 至 2020-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=681566
• 关键词: MEMS; passive; strain; recorders; counters

The goal of this proposal is to develop small 2 MEMS peak strain recorders and strain cycle counters. A user can adhere the MEMS device to a structure, and come back a week or a year later, and take a photograph that records the peak strain and number of cycles experienced by the structure. This is a passive, purely micro-mechanical system.**Most strain gages are resistance based: they are small (**Typically strain values are small (1 micro strain = 1 ppm); for a gage length of 1 cm, measuring 10 micro strain would require detecting 0.1 micron changes. Measuring such small changes is possible using a passive MEMS system, no power source required. A MEMS latching system is used to permanently store peak strain values. The MEMS device contains the micro-scale equivalent of a bar code and the recorded strain can be read optically using a smartphone. Modern smartphone cameras can in fact measure at the micro-scale. The key to this is Fourier based techniques that can robustly detect sub-micron scale displacements. ****Small, inexpensive and passive recording gages open up an entirely new possibility: the ubiquitous monitoring of mechanical structures. Just as many consumer goods come with disposable passive RFID tags, many mechanical components could be tagged with a MEMS strain recording patch. Aircraft components, automobile parts, wind turbines, artificial limbs, buildings, any mechanical part could have a MEMS patch applied and then be monitored to measure peak loads. Has the structure been overloaded? Has this structure exceed its safe limit? Key to this potential is making the strain recorders small and passive using MEMS.**

这项提议的目标是开发小型2MEMS峰值应变记录器和应变循环计数器。用户可以将MEMS设备粘贴到结构上，一周或一年后回来，并拍摄一张记录结构经历的峰值应变和循环次数的照片。这是一个被动的纯微型机械系统。**大多数应变计都是基于电阻的：它们很小(**通常应变值很小(1微应变=1 ppm)；对于1厘米的应变计，测量10微米应变需要检测0.1微米的变化。使用无源MEMS系统测量如此微小的变化是可能的，不需要电源。MEMS锁存系统用于永久存储峰值应变值。MEMS设备包含相当于条形码的微尺度，可以使用智能手机光学读取记录的应变。现代智能手机摄像头实际上可以在微尺度上进行测量。实现这一点的关键是基于傅里叶变换的技术，这种技术可以强有力地检测亚微米级的位移。*小型、廉价和被动记录仪开辟了一种全新的可能性：对机械结构的无处不在的监测。就像许多消费品都带有一次性无源RFID标签一样，许多机械部件可以用MEMS应变记录贴片来标记。飞机部件、汽车部件、风力涡轮机、假肢、建筑物、任何机械部件都可以应用MEMS贴片，然后进行监控以测量峰值负载。建筑物超载了吗？这个结构是否超过了它的安全极限？这种潜力的关键是使用MEMS使应变记录器变得小巧和无源。**