Reactive Ion Etcher for Commercially Relevant Quantum Devices

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Quantum devices are at the heart of quantum sensors and quantum computers, technologies poised to surpass the limits of what can be measured or computed with classical technologies. Devices for quantum sensing, considered one of the first applications of quantum computers, are already delivering unprecedented sensitivity, speed, and efficiency, in present-day technological applications. Improvements in quantum devices have driven recent advances in noisy intermediate scale quantum (NISQ) computers on the cusp of outperforming classical computers in real-world problems, and in the future will enable general purpose quantum computers that mitigate noise and tackle a much wider class of problems. Canada is in pole position to cement international leadership in the quantum technology revolution. So great are the potential capabilities of quantum technologies that this sector could have the same economic impact as the integrated circuit revolution and the internet and tele-communications revolution in the last half-century. This proposal is for the purchase of dedicated reactive ion etching fabrication equipment for research on superconducting quantum devices for quantum sensors and quantum computers. The first device to be investigated is being pursued in partnership with a world-leading quantum computing company (D-Wave Systems). The quantum device is a superconducting nonlinear inductor having properties that will enable more qubits to be integrated in commercial quantum computers, and will enable quantum computer architectural innovations that will increase the number of use-cases for their quantum computer. The second device is an integrated single photon detector for integrated (on-chip) photonics with near-unity efficiency over a broad range of operating wavelengths, for secure quantum communication (quantum key distribution), for purely photonics-based quantum computers (Xanadu, PsiQuantum), and for spin-photonic quantum computing (Si donors or diamond NV). The third device is an ultra-miniaturized integrated NbTiN and TiN superconducting microwave resonator. The purpose of this device is to simplify the coupling and readout of high performance hole spin qubits, for general purpose quantum computers. These silicon-based platforms are poised to leverage the capabilities of modern foundries, greatly improving the prospects for commercial quantum sensors and large-scale UQCs that are tolerant to errors.