A System for Coupled-Field Characterization of Nanomaterials and Nano Devices

纳米材料和纳米器件耦合场表征系统

• 批准号: RTI-2021-00786
• 负责人: Sun, Yu
• 金额: $ 10.8万
• 依托单位: University of Toronto
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=718786
• 关键词: System; Coupled; Field; Characterization; Nanomaterials

The characterization of nanomaterials (NMs) is critical for guiding the synthesis of NMs and the construction of NMs-based devices. This team of applicants and collaborators have together established a coupled-field NMs characterization platform inside a scanning transmission electron microscope (STEM) in the Ontario Centre for Characterization of Advanced Materials (OCCAM) at UofT. This RTI application requests a scanning current imaging (SCI) system to strengthen the electrical characterization capabilities for the coupled-field characterization of NMs. This requested SCI system contains the following unique capabilities (modes) that are essential to our proposed research programs. (1) Electron Beam Induced Current mode for imaging the minority carrier profile of a semiconductor NM, which allows the measurement of its minority carrier diffusion length under multi-field excitation; (2) Resistive Contrast Imaging mode for noncontact electrical resistivity mapping of NMs under mechanical loading; (3) Electron Beam Absorbed Current mode for identifying conducting paths and mechanical strain-induced changes of conducting paths in NMs-based films. The SCI system includes an in situ pre-amplifier, which enhances the I-V measurement that currently suffers from high noise interference. To achieve low contact resistance for accurate characterization, this RTI application also requests an in-chamber plasma cleaner to remove (1) electron beam-induced hydrocarbon contamination and (2) residue contamination from NMs' synthesis and transfer process. The requested instruments will be installed in OCCAM's STEM and integrated with our existing infrastructure to form a powerful platform for coupled-field characterization of NMs. Our HQP will use the equipment to conduct in situ coupled-field characterization of 1D/2D NMs and NMs-based composite films and make exciting discoveries. The equipment will be used to train a high number of HQP who will gain skills in nanomaterials synthesis and characterization, nanomechanics, precision instrumentation, and nano device development.

纳米材料的表征对于指导纳米材料的合成和基于纳米材料的器件的构建具有重要意义。这组申请者和合作者共同在加州大学安大略省先进材料表征中心(OCCAM)的扫描透射式电子显微镜(STEM)内建立了一个耦合场NMS表征平台。 这种RTI应用需要一种扫描电流成像(SCI)系统来增强用于NMS的耦合场表征的电表征能力。本申请的SCI系统包含以下独特的功能(模式)，这些功能(模式)对我们建议的研究计划至关重要。(1)电子束感应电流模式，用于成像半导体NM的少数载流子分布，允许测量多场激励下的其少数载流子扩散长度；(2)电阻对比成像模式，用于机械加载下非接触NMS的电阻率成像；(3)电子束吸收电流模式，用于识别NMS基薄膜中的导电路径和机械应变诱导的导电路径变化。SCI系统包括一个现场前置放大器，它增强了目前受到高噪声干扰的I-V测量。为了实现低接触电阻以实现准确的表征，这种RTI应用还要求室内等离子体清洗器去除(1)电子束引起的碳氢化合物污染和(2)NMS合成和转移过程中的残留污染。 所要求的仪器将安装在OCCAM的STEM中，并与我们现有的基础设施相结合，形成一个强大的平台，用于描述NMS的耦合场特性。我们的HQP将使用该设备对1D/2D NMS和NMS基复合薄膜进行原位耦合场表征，并取得令人兴奋的发现。该设备将用于培训大量HQP，他们将获得纳米材料合成和表征、纳米机械、精密仪器和纳米器件开发方面的技能。