微结构对YIG基磁子晶体波导自旋波传输特性调制研究

随着微加工技术的进步，半导体技术已经快到其本征极限，以自旋波作为载体来进行信息传输和处理的方式为人们打开了新的视角。磁子晶体是种人工微纳米结构复合材料，自旋波通过它时会产生禁带和导带。研究表明，通过改变磁子晶体的结构形状和大小，以及外加磁场都会改变自旋波在其中的传播。以低阻尼钇铁石榴石（YIG）为基的磁子晶体波导倍受关注，但研究主要集中在对长波长自旋波在其中的传输特性上。因此，本项目拟通过微磁模拟计算设计出不同微结构的YIG磁子晶体波导，在优质YIG磁性薄膜上通过光刻，湿法刻蚀，离子刻蚀，气相刻蚀等工艺制备出相应微结构的YIG波导，并通过基于矢量网络分析的铁磁共振，布里渊光散射法等测试手段获得其自旋波传播特性，研究不同微结构对不同波长自旋波的调制机理，构建出一套完整的知识系统，实现实验和理论在此方面的统一。

Magnonic crystal is a kind of artificial structure compound materials with size of micro- and nano-meter. When spin-wave go through the magnonic crystal, the conductive band and band gap will be produced. According to the corresponding research on magnonic, the propagation of spin-wave can be changed by the specific structures of magnonic crystal and applied magnetic field. YIG-based magnonic crystal with low damping factor attracts a lot of attention. Therefore, our project intend to design YIG magnonic crystal waveguide with different artificial micro-structures by using OOMMF method, fabricate the corresponding YIG magnonic crystal waveguide on YIG films with high crystal and good magnetic property by use of etching methods, such as photolithography, wet etching, ion beam etching, get the spin-wave dispersion relationship through VNA-FMR and BLS, and finally find the mechanism of modulation of different micro-structure in propagation properties of spin-wave with different wavelengths. Our aim is to construct a detail knowledge of this aspect.