基于预成形作用的主、副刻刀错刃机械刻划衍射光栅方法研究

机械刻划光栅过程中槽面的弹塑性变形和母刻光栅批量复制时的使用效率问题，一直是制约光栅制造技术水平和高性能光谱仪器水平提高的瓶颈。基于预成形作用，提出了一种主、副刻刀错刃机械刻划的新方法，通过刻划机带动刀架的一次性走刀就能实现主刻刀对副刻刀预成形槽面的二次精刻划。首先依据所提方法建立相应槽面的弹性回弹和残余应力的三维拓扑数学模型；从槽面加工硬化饱和度的概念出发，建立起槽面的弹性回弹及残余应力和错刃刻划工艺参数之间的数学关系，并优化刻划工艺参数；研制错刃刻划精密可调刀架；研究远场激光衍射在线对刀/调刀/检刀一体化检测方法及检测装置；最后综合理论、仿真和试验研究，总结相关规律和方法，更好地控制槽面的弹性回弹和残余应力，提高母刻光栅槽面的成形质量和批量复制时的使役性能。相关研究成果同样适用于传统的单刀刻划方法，对于促进我国机械刻划技术水平和高性能光谱仪器水平的提高具有重要价值和意义。

The problems of grooves elastic-plastic deformation during mechanical ruling grating and using efficiency during mother grating replication of lot size are always the bottleneck of increasing the levels of grating manufacturing and optical spectrum instruments of high performance. Based on pre-forming function, a new method of mechanical ruling with master and auxiliary staggering edges are put forth, which can be realized by one-time ruling of the tool carriage on the ruling engine while using the master tool for secondary ruling on the pre-forming groove surfaces ruled by the auxiliary tool. Firstly, 3D topology mathematical models of elastic recovery and residual stress on the surfaces are set up under the function of pre-forming. From the concept of work hardening saturation of groove surface, build up the mathematical relation between the elastic recovery, residual stress and the process margin parameters of ruling with staggering edges, and optimize the relative parameters. Manufacture the precise adjustable carriage for master and auxiliary staggering ruling tools. Study the on-machine integrated detection method for tool setting, tool adjustment and tool wear detection based on far-field laser diffraction principle, and then manufacture the detection device. Finally, make a synthesis of the theory, simulation and experiment studies, summarize the relative regularity and method, control the elastic recovery and residual stress on the surfaces better to improve the forming quality of mother grating and the using performance during mother grating replication of lot size. Relative findings can also suit for the traditional ruling method with one tool, and having significant value and meaning for increasing the levels of grating manufacturing and optical spectrum instruments of high performance.