全固态微型化三轴谐振式光学陀螺应用基础研究

发展新一代的三轴高精度陀螺仪，满足航空航天与装备技术领域的长航时自主导航应用需求，具有十分重要的战略意义。项目提出一种新型的全固态三轴谐振式陀螺传感检测模式，拟以三轴耦合球形光学微谐振腔为谐振式光学陀螺系统的敏感功能单元，研制一种全固态三轴微光机电陀螺；采用锥形光纤倐逝场耦合方法，结合热熔融法制备的微球谐振腔形成耦合单元，重点突破硅基纳米光波导结构亚纳米精度制造及一体化集成设计技术难题，研究陀螺系统中的背向散射噪声和偏振波动噪声的产生机理及相应的解决方案；采用时分复用方案，实现陀螺系统信号的三轴输出检测，解决三轴微光机电陀螺的集成问题，为新一代导航级固态微光机电陀螺的研制提供关键技术支撑。

As the key component of the inertial navigation system, gyroscope with high sensitivity is extremely important for the long time navigation applications in the fields such as aerospace flight, airplanes, ships and some other equipments. A novel three-axis optical gyro gyroscope based on microsphere resonator is proposed in this project. Using the coupling method of evanescent field, combined with the microsphere resonator prepared by the hot-melt method to form the coupling unit, focusing on the breakthrough of sub-nanometer precision manufacturing and integrated design technology, research on the suppression of gyro system Backscatter noise and polarization fluctuation noise. This method is more suitable for the sensor chip design and integration.