本项目针对跨尺度激光精细加工过程中因装备的光机电系统无法协同所产生的拼接误差，开展激光装备光机电协同控制机制的研究。通过分析插补段长度和速度、加速度初始值对驶出值的约束关系，提出新型的速度规划及加速度前瞻算法，实现光斑在加减速运动过程中加速度的连贯性。通过研究光斑轨迹速度、振镜视场大小、伺服跟随特性与光斑点位命令分配的关联关系，开发基于频率特性的光斑点位自适应分配算法，实现进给系统和振镜系统的主从协同控制。设计光斑跟随特性试验台，分析振镜电机的机械特性，提出基于状态观测的新型振镜数字控制策略，提高光斑的跟随精度。设计搭建龙门式进给系统试验台，提出针对大导程滚珠丝杆的新型串级控制结构，在不减少鲁棒性的情况下提高进给系统的位置环带宽。将振镜系统集成在进给试验台上，对光机电协同控制系统的综合性能进行测试与优化。通过上述内容的开展，攻克跨尺度激光设备运控系统的核心算法瓶颈，提升我国在高端激光加装备

The alignment error in the large scale pattern is the main defect by the cross-scale laser manufacturing. To solve this problem, the research on the optical-mechatronic synchronizing control mechanism is proposed. A novel look-ahead algorithm will be presented for the acceleration continuation by the motion control though the constraint analyzing among the length of the interpolation segment, the initial value at the entry point as well as the reachable value of the speed and the acceleration at the exit point. Though the study of the influence from the speed of laser spot, the size of the galvanometer field and the tracking performance of the servo systems, the set points of the laser spot will be adaptive decomposed, so that a master-slave control scheme of the mechanical servo system and the galvanometer could be implemented. A test bench with a CCD camera will be developed for the tracking performance of the galvanometer. Considering the mechanical transform response, a novel digital control strategy will be proposed to improve the tracking performance of the galvanometer. A test bench with the gantry structure will be designed. A new cascade control structure will be presented for the mechanical servo system to enhance the feed drive dynamics with sufficient robustness. The galvanometer will be integrated on the gantry test bench. The performance of the optical-mechatronic synchronizing control will be verified experimentally. The research on the above-mentioned points will help in overcoming the choke point on the core algorithm of the optical-mechatronic synchronizing control system and improve the scientific and technological autonomy in high-end laser manufacturing equipment.