硬质纳米多层膜的增韧是材料表面工程领域一个重要的科学和工程问题。然而现有研究中针对硬质纳米多层膜的增韧机理存在一定的分歧，主要体现在调制层中相结构转变对纳米多层膜的相变增韧机制，以及共格/非共格界面下纳米多层膜的增韧机理等。结合申请人前期的预研结果－调制层的相分离有助于纳米多层膜的增韧，本项目拟聚焦以下三方面的研究：(1)选取具有相分离特征的ZrO2-Y和AlN-Ni作为纳米多层膜的调制层，研究应力诱发的t-ZrO2→m-ZrO2和c-AlN→w-AlN相变导致的调制层体积膨胀对纳米多层膜增韧的影响及其相变增韧机制；(2)选取具有相分离特征的纳米复合膜作为调制层，优化调制周期获得与不同结构主体层之间的共格生长界面，研究共格界面下调制层相分离程度对纳米多层膜的增韧效果及其机理；(3)通过改变调制周期获得非共格生长界面，研究非共格界面下调制层相分离行为对纳米多层膜增韧的影响及其机理。

Toughening of the hard nanomultilayered film is an important scientific and engineering issue in the research field of material surface engineering. However, in the current research, no consensus has been reached about the scientific problem of toughening mechanism for the hard nanomultilayered film, which mainly reflects in the transformation toughening mechanism resulted from the phase transition within the modulation layer and toughening mechanisms under the coherent and non-coherent growth structures. Combined with on our initial research finding that the phase segregation in the modulation layer can help improve toughening of the hard nanomultilayered film, this project focuses on the following three research aspects: (1) By selecting the ZrO2-Y and AlN-Ni with feature of phase segregation as the modulation layers, the effects of the volume expansion of modulation layer resulted from stress-induced t-ZrO2→m-ZrO2 and c-AlN→w-AlN transformations on toughening of hard nanomultilayered film and its transformation toughening mechanism are investigated; (2) By adopting the nanocomposite films with characteristic of phase segregation as the modulation layers, the coherent interfaces between the primary layers with different structures and the modulation layers are obtained by optimizing the modulation period, and the influence of the phase segregation degree in the modulation layer on toughening of hard nanomultilayered film and its mechanism are studied; (3) Under the incoherent growth structure by adjusting the modulation period, the effect of phase segregation behavior in the modulation layer on toughening of hard nanomultilayered film and its mechanism are studied.