薄膜化氧化物燃料电池新颖CVD制备技术研究

针对目前氧化物燃料电池（SOFC）研制路线中困难和中温操作的发展趋势，提出一种全新的SOFC阳极-电解质-阴极（PEN）材料结构，发展新颖的气溶胶微波等离子体CVD技术，同位制备PEN多层膜。研究气溶胶形成和输运，等离子体CVD过程热、动力学和材料生长习性，多层膜微结构，相互作用和电化学特性，为高性能薄膜型SOFC的发展打下工学基础。

Novel aerosol assisted chemical vapor deposition (AACVD) techniques have been developed to prepare ceramic thin films， focused on electrolyte and electrode materials in micro intermediate temperature solid oxide fuel cells (SOFCs). Three types AACVD including aerosol assisted metalorganic CVD, plasma-AACVD and combustion-AACVD have been designed and employed to prepare Y2O3-stabilized ZrO2 (YSZ), Y2O3 doped CeO2 (YDC), Gd2O3 doped CeO2 (GDC) and La0.8Sr0.2MnO3 (LSM) thin films not only on single-crystalline Si substrate but also on multi-crystalline ceramic substrate. All the thin films were prepared at their respective temperatures and characterized by the structure, component, morphology and electrical properties. We also tried to approach and model the transport mechanism and film growth behaviour during CVD process. Volatile metal b-diketonate chelates employed as precursors in MOCVD processes were synthesized and characterized. Spray pyrolysis system has been assembled and used to synthesize SrFeCo0.5O3.25+d ultrathin powder. Thin film SOFCs have been constructed and measured. These results will be beneficial to the application of AACVD technique in ceramic science.