光学干涉测量具有高精度、高速度和非接触等优点，在静止物体形貌测量领域得到广泛的应用。在微机电系统和生物科学中，机械和薄膜的振动特性是评估其性能的重要指标，这类振动通常具有高频率(兆赫兹)和微小振幅（纳米量级）的特点。本项目中，我们将研究一种检测高频振动的光学相干测量方法，测量振动频率和振幅的同时得到振动物体的表面轮廓。此方法有两个优点，第一，使用普通工业相机全场测量，大大降低了成本。第二，检测振幅和频率存在变化的高频正弦振动，在一定程度上突破了基于闪频照明或时间平均技术要求的物体振动稳定的限制。本项目的研究对微机电系统的检测矫正和研究物体的高频率振动特性有重大意义。

Because of the advantages of high accuracy, high measurement speed and non-contact, the interferometry has been widely applied to measure the profile of stable object. In the field of Micro-Electromechanical Systems (MEMS) and Bioscience, the vibration characteristics of machinery and film are important indexes to evaluate their performance. This kind of vibration usually has the characteristics of high frequency (MHz) and small amplitude (Nanometer scale). In this project, a measurement method for the high vibration frequency is investigated. There are two outstanding merits: Firstly, the normal industrial camera is used to do the full-field measurement which greatly reduces the cost. Secondly, our method is capable of measuring the sinusoidal vibration with changing amplitude and frequency which break the limitation of object with stable vibration given by the strobe illumination and time-averaged technology. The research of this project is of great significance for the detection and correction of MEMS and the study of high frequency vibration characteristics of objects.