针对无线传感网络节点对储能单元的要求，本项目拟从C-MEMS制备硅基超级电容器三维微电极出发，通过建立三维微电极阵列的电场有限元模型，确定最佳三维微电极阵列结构参数；建立应力演变模型，确定最佳斜光刻条件制备高深宽比三维微结构阵列；探究碳化过程中孔隙产生机理和孔径分布规律，确定最佳碳化条件制备三维微电极；探究掺杂和活化对孔径的调控机理，确定最佳掺杂和活化条件增加微电极有效比表面积，最终实现高性能MEMS超级电容器。

For the energy storage requirement of WSN, the aim of this project is to fabricate three-dimensional microelectrodes with C-MEMS technology and study the critical issues during fabricating processes for MEMS supercapacitors. Firstly, we will establish a finite element model of the micro arrays to determine the best structural parameters, and then we will built a strain change model to determine the best parameters during inclined UV photolithograph to fabricate the three-dimensional SU-8 microstructures, which will be used to fabricate the three- dimensional micro arrays by the technology of carbonization, meanwhile, doping and activation processes will be performed to optimize the aperture for increasing the specific surface area of the micro electrodes. Furthermore, silicon substrate will etched to increase the adhesion between the substrate and microarrays. Finally, the gel polymer electrolytic will be used to form a all solid-sate MEMS supercapacitor with the help of anodic bonding and vacuum priming technology.