为实现型腔表面高效、高质量、低成本的超精密抛光，提出了一种基于介电泳和自激振荡复合效应的抛光方法。抛光过程中，经自激振荡脉冲发生装置，抛光液由连续性流动转变为涡环脉冲特性流动进入型腔，使得磨粒在型腔表面的“滑动摩擦”连续流动转变为复合“滚动摩擦和滑动摩擦”涡环脉冲波流动。同时，型腔内布置一个非均匀电场，电场的1个电极靠近型腔表面，使极化后抛光液和磨粒移向型腔表面附近电极，参与型腔表面抛光，增大磨粒与工件表面峰值压力，提高了磨粒对型腔表面抛光效率。轴向对称的连续涡环脉动流体，能与不同曲率的曲面都保持良好的吻合度，实现无加工死角的材料去除。本项目通过理论分析、数值模拟和实验研究，揭示介电泳和自激振荡复合效应抛光机理，研究复合效应作用定量控制的关键因素和方法，分析工件材料的去除特性，构建加工实验平台，探索该抛光方法应用的关键技术，有望发展一种高效、高质量、低成本的新型型腔表面抛光方法。

A novel polishing method, which is based on self-excitation oscillation pulse effect and dielectrophoretic (DEP) effect, is proposed in order to achieve high efficiency,high quality and low cost for polishing cavity surface. The novel method employes self-excitation oscillation generator with a certain fluid structure. During the polishing process, through the self-oscillation generating device, the abrasive flow is transformed from the continuous flow into the vortex ring pulse characteristic flow."sliding friction"of continuous flow on workpiece surface is changed into compound"rolling friction and sliding friction" of the vortex ring pulse flow. At the same time, An inhomogeneous electric field is arranged in the cavity, and one electrodes of the electric field is close to the surface of the cavity. After being polarized, slurry and abrasives moved toward the electrode , which is near cavity surface, its taked part in ploishing cavity surface. the peak pressure of abrasive flow on workpiece surface is increased, so the polishing efficiency of the abrasive flow is improved.the continuous vortex ring pluse of abrasive flow is with an axial symmetry,it can match with the complete curved surface with various curvature, workpiece surface can be completely polishing. the theoretical analysis, numerical simulation and experimental research will be employed, the mechanism of self-excition oscillation pulsed jet polishing will be revealed, the key factors and methods of the quantitative control for the action of the self-excitation oscillation pulse will be studied,the removal characteristics of the workpiece's material will be analyzed. Experimental platform will be builded, the key technology of the application will be explored, a new polishing method for complex curved surface with high efficiency, high quality and low cost will be developed.