高端装备关键件结构日趋复杂化/大型化，对加工技术提出挑战，迫切需求高柔性运动单元，以实现一次装夹柔性加工/小装置加工大零件。多轴串联机械臂具有自由度多、灵活性强及空间范围可达性广的特点，为所需复杂空间运动提供了一种有效解决途径。然而，机械臂运动过程中，关节-连杆柔性效应亟增，末端轨迹误差累积效应严重，难以满足加工轨迹精度要求，研究机械臂复杂运动轨迹规划与精度提升技术成为实现高端装备关键件高效加工的关键技术之一。基于复杂空间运动路径，探索多自由度串联运动链快速稳定解耦方法，突破运行平稳与时间最优协调的机械臂关节空间运动轨迹规划技术，建立机械臂多误差源耦合模型，提出基于多源误差敏度分析的末端运动误差高效补偿方法，开发轨迹规划动态仿真系统，最终形成多轴串联机械臂复杂运动轨迹规划的新方法、新技术。研究成果将创新高端装备关键件制造工艺、扩展多轴串联机械臂应用范围、促进高端装备关键件智能化制造水平。

The structure of key parts in the high-end equipment is becoming more and more complicated or larger, which poses challenges to the processing technology. There is an urgent need for the high flexible feeding units to realize the flexible processing within one-time clamping or the processing of large parts with small device. Multi-axis serial manipulator is characterized by many freedom degrees, strong flexibility and wide accessibility of space range, which provides an effective solution for the complex space motion. However, in the moving process of mechanical arm, the flexibility effect for joint-connecting rod is strong and the error accumulation effect for end track is serious, which cause that it is difficult to meet the accuracy requirement of machining path. In this way, the study on the complex trajectory planning and its precision improvement technology for the multi-axis serial manipulator is one of the key technologies to realize the efficient machining of key parts in the high-end equipment. Based on the complex space motion path, the fast-stable decoupling method should be firstly explored for the multi-axis serial kinematic-chain, and then the trajectory planning technology in joint space of the mechanical arm must be broken through with the coordination between smooth operation and time optimization. After the building of the coupling model of multi-sources of errors for the mechanical arm, the efficient error compensation method for end motion will be proposed based on the sensitivity analysis for multi-sources of errors, and the dynamic simulation system can be developed for the trajectory planning of multi-axis serial manipulator. Eventually, new methods and new technologies are formed for the trajectory planning of multi-axis serial manipulator. The research achievements will innovate the manufacturing process of key parts in the high-end equipment, expand the application range of multi-axis serial manipulator, and promote the intelligent manufacturing level of key parts in the high-end equipment.