微机械谐振器多模态耦合形成机理、动力学性能调节与降噪方法

微机械谐振器的多模态耦合形成机理与复杂非线性动力学特性，既是当下动力学设计理论中的极具挑战性基础研究，也是微机械谐振器设计、性能优化与试验测试方法等应用研究中迫切需要解决的技术难题。本项目针对微机械谐振器多机械模态耦合现象的形成机理、动力学特性、相应器件设计与振动控制方法等方面，拟开展如下研究：厘清微机械谐振器的多机械模态耦合形成机理，建立评估耦合强度的力学模型，提出耦合结构单元的拓扑优化设计与动态调节方法；揭示表面效应与尺度效应对谐振器多模态耦合现象的作用机制和影响规律；分析多模态耦合谐振器模态畸变与分叉等复杂非线性动力学特性；研究多模态耦合微机械谐振器设计、性能动态调节与相位噪声抑制方法。因此，本项目的实施，将构建微机械谐振器多模态耦合现象的力学模型，厘清其形成机理和多模态耦合谐振器的能量传递规律，制备出基于多机械模态耦合原理的高灵敏度、高信噪比与良好稳定性微机械谐振器。

Multi-mode coupling mechanism and complex nonlinear dynamic properties of micromechanical resonators, are not only the very challenging fundamental research of dynamical design theory, but also the extremely urgent technical problems of application researches, including the design, performance optimization and testing methods. In this project, the mechanism of multi-mechanical mode coupling, the dynamical properties, the corresponding device design and the vibration control methods of the micromechanical resonators are thoroughly studied. The following work are to be carried out: the mechanism of multi-mechanical mode coupling, the topology optimization design of coupling structural unit and mechanical model of micromechanical resonators are researched; the influence law of surface effect and scale effect on the multi-mechanical mode coupling phenomenon is revealed; complex nonlinear dynamic characteristics, such as mode distortion and bifurcation, of multi-mode coupled resonators under forced vibration are analyzed; the design, fabrication and testing of multi-mode coupled micromechanical resonators are investigated, the methods of dynamic tuning of device performance and phase noise reduction are proposed. Therefore, the mechanical models of multimodal coupling in micromechanical resonators are established, the mechanism of multimodal coupling and the energy transfer path of the multimodal coupled resonators are revealed, novel micromechanical resonators with high sensitivity, high signal-to-noise ratio and good stability are prepared after the implementation of this project.