基于压电势驱动场效应管的柔性可存储性电子皮肤的研究

The target of this proposal is to achieve an information-storable E-skin based on piezopotential-powered field effect transistor (FET) and to investigate the working mechanism for the integrated system. In this proposal, transparent indium gallium zinc oxide (InGaZnO) with high mobility will be selected as the channel material for FET, while poly(vinylidenefluoride-co-trifluoroethylene) (P(VDF-TrFE)) assuming a stable piezoelectric crystalline (β-phase) at room temperature will be used as the main material for nanogenerator (NG). Through highly capacitive ion gel dielectrics ([EMIM]+[TFSI]-) coupling, the InGaZnO FET and NG will be integrated together to develop an information-storable sensor by introducing a grounding electrode through soft contact lamination. As the integrated system can be considered as two capacitors in series connection, the charges stored in FET electrical double layer (EDL) capacitor can be programmed/erased through applying/releasing the external strain for NG-capacitor. Notably, this is the first time to propose the model of memory programming/erasing through mechanical strains without any floating-gate charge trapping layer in the integrated system. Based on the proposed information-storable sensor, several applications will be demonstrated, including piezopotential-powered InGaZnO FET active matrix for strain mapping, electronic whisker with memory function and visual output of the stored information by integrating LEDs. This proposal is considered to compensate for the drawbacks that E-skin features only sensing properties but without any functions for information storage. Piezopotential powering for this information-storable sensor will also pave the way for future self-powered multifunctional E-skin.

本项目将研究利用纳米发电机压电势作为栅压驱动场效应管并开发具有存储功能的柔性电子皮肤阵列。该项目的研究可以弥补低能耗电子皮肤只有感应功能而不能存储信息的不足是开发未来无需任何外接电源就能有效地实现感应、存储和反馈的电子皮肤研究的先驱工作。本课题拟采用透明且具有高迁移率的铟镓锌氧化物(InGaZnO)作为场效应管的沟道材料，利用(P(VDF-TrFE))作为纳米发电机压电材料,借助离子液体中形成的双电层(EDL)将纳米发电机输出电压作为场效应管的栅压来对两器件进行耦合。同时，通过利用软触点叠压接地电极的易操作性，本课题将在无需增加任何悬浮栅电荷捕获结构的条件下实现该系统的耦合传感和存储功能。因为该耦合系统可看作是两个电容器的串联，所以场效应管电容中存储信号的编程/擦除过程只需要利用纳米发电机上外界应力的施加/释放就可以实现。基于此存储型传感器，本课题还将研究相应的示范化应用。

本项目利用纳米发电机压电势作为栅压驱动场效应管并实现了具有存储功能的柔性电子皮肤阵列。该项目的研究弥补了低能耗电子皮肤只有感应功能而不能存储信息的不足是开发未来无需任何外接电源就能有效地实现感应、存储和反馈的电子皮肤研究的先驱工作。本课题采用了透明且具有高迁移率的铟镓锌氧化物(InGaZnO)作为场效应管的沟道材料，利用(P(VDF-TrFE))作为纳米发电机压电材料,借助离子液体中形成的双电层(EDL)将纳米发电机输出电压作为场效应管的栅压来对两器件进行耦合。同时，通过利用软触点叠压接地电极的易操作性，本课题所开发的耦合器件可在无需增加任何悬浮栅电荷捕获结构的条件下实现该系统的耦合传感和存储功能。该耦合系统可看作是两个电容器的串联，对应场效应管电容中存储信号的编程/擦除过程可利用纳米发电机上外界应力的施加/释放可以实现。基于此存储型传感器，本课题还研究了相应的示范化应用。

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