随着现代科学技术的发展，尤其是微纳米技术和现代制造业的发展，对物体表面的微小形貌与变形的实时三维测量需求日趋强烈。数字全息法测量分辨率可达激光波长量级，尤其适合于微小形貌与变形的三维测量。目前现有的数字全息方法基本可以实现对三维变形的实时测量，但是对三维形貌的实时测量还没有比较好的解决办法。本项目采用无透镜傅里叶变换数字全息法，结合多相机立体测量技术，实现对微小形貌与变形的实时三维测量。项目采用严格的标量衍射理论深入分析无透镜傅里叶变换全息法的成像原理，建立基于不同方向的物光相位信息计算物体表面三维形貌与变形的模型、基于物光相位信息的三维测量系统标定计算模型，构建可以同时测量微小形貌与变形的实时三维测量系统，为微纳米器件等微小物体的力学检测及损伤失效分析提供一种新的、有效的测量方法。

With the development of modern science and technology, especially micro/nano-technology and modern manufacturing industry, the needs of 3D real-time measurement for micro shape and deformation are becoming more and more intense. Digital holography is especially suitable for 3D measurement of micro shape and deformation because of its high resolution of about laser wavelength. Currently, the existing digital holographic methods can basically realize real-time measurement of 3D deformation, but can not absolutely realize the real-time measurement of 3D shape. In this project, the 3D real-time measurement for micro shape and deformation will be realized using lensless Fourier transform digital holography combined with stereophotogrammetry with multi-cameras. Based on analyzing the priciple of lensless Fourier transform digital holography using strict scalar diffraction theory, the model of 3D shape and deformation calculation with phases from different directions and the model of calibration based on object wave phase information are established. The 3D real-time measurement system for micro shape and deformation is constructed. This project can provide an novle and effective method for the mechanical measurement and damage analysis of micro objects such as MEMS.