近年来，亚太赫兹(0.1-1 THz)电磁波引起了广泛的科研关注。由于亚太赫兹的光子能量很低，需要高功率光源与高敏感侦测器以满足实际应用。现行的光源通常体积庞大且能耗高，难以实现小型件微型化。经实验证实，采用超材料结构可产生窄频红外线光源，这为产生亚太赫兹辐射提供了新方法。应用此物理原理，本课题提出了一种MEMS窄频亚太赫兹发射器(光源)，并进一步与微加热器进行单片集成。该器件具有微型化、成本低、调变范围大、响应时间短、与CMOS制程兼容等优点，可广泛应用于无线高速通讯(200-300GHz)系统、可携带式光谱仪系统和各式类型的微感测器。

Recently, electromagnetic waves in the sub-terahertz (sub-THz) frequency range have received tremendous research attention. This spectral range (frequencies between approximately 0.1 and 1 THz) is of special interest for widespread applications because many substances have a specific spectral response in this frequency interval. The continued interest in sub-THz research demands high power sources and sensitive detectors because the energy of photons in sub-THz range is relatively low. Imaging system in this spectral range generally requires an illumination source due to the lack of appreciable background thermal radiation. "Metamaterials" are artificially made electromagnetic materials consisting of periodically arranged metallic elements which are less than wavelength of incident electromagnetic wave in size. Moreover, metamaterials can exhibit the thermal generation of narrowband infrared by controlling emissivity, which may provide novel tools to significantly generate the sub-THz radiation. Metamaterial emitter at sub-THz spectral region has been demonstrated and seems to be a promising direction of the future for wide range of sub-THz applications. In this project, we propose four tasks for developing sub-THz emitters. Firstly, a sub-THz metamaterial narrowband emitter will be explored on spectral emissivity. Secondly, we will design novel metamaterial designs with different pattern size in out-of-plane direction as a single unit cell to provide broadband emission. Thirdly, we will use stressed beam concept to demonstrate a MEMS-based sub-THz metamaterial emitter to achieve longer tuning range and faster speed. Finally, we will deliver a miniaturized metamaterial emitter with potential monolithic integration with CMOS IC process. Therefore, we can demonstrate single narrow band, multiple narrow bands and broadband emitters with active control on the chip-level. In the future, the MEMS-based sub-THz metamaterial emitters can be not only used in the optical, biological, medical and imaging system, but also used in high-speed communication system, portable spectroscopy and various sensors applications.