基于纳米发电机的自驱动MEMS/NEMS机理研究

本项目提出一种基于纳米发电机的自驱动MEMS/NEMS新机理，采用纳米结构有机功能材料的摩擦发电原理，探索用摩擦纳米发电机驱动微悬臂梁执行器运动的理论模型、器件制备和特性分析，实现有源致动和精确操作的自驱动技术；同时结合纳米氧化锌压电薄膜材料，探索微悬臂梁结构运动的测量方法和压电纳米发电机在微悬臂梁结构上的制备工艺，实现有源传感和运动测量的自驱动技术；最后采用微机电一体化设计技术，构建基于摩擦纳米发电机、压电纳米发电机和微悬臂梁结构的自驱动MEMS/NEMS集成系统，实现对微悬臂梁结构运动的有源致动和有源传感技术的融合。与传统微/纳执行器和传感器相比，本项目研制的自驱动MEMS/NEMS具有无需外电源供电、高效节能和多功能一体化集成等优点，适用于在微/纳机器人、光开关和物联网等领域中对微观结构运动的致动和测量，对独立、持续的自驱动MEMS/NEMS器件的应用具有积极意义。

A new mechanism of self-powered MEMS/NEMS based on nanogenerator is proposed in this project. With the triboelectric-generation principle of nano structured organic functional materials, we study the triboelectric nanogenerator (TENG) actuated micro cantilever, including the theoretical model, device fabrication and characteristics analysis, aiming at realizing the self-powered technology of active actuation and precise operation. Moreover, with nano-ZnO piezoelectric film materials, we study the movement measurement method of the micro cantilever and fabrication technology of the piezoelectric nanogenerator (PENG) on the micro cantilever beam, aiming at realizing the self-powered technology of active sensing and movement measurement. Finally, with the MEMS integration design technology, we study the self-powered MEMS/NEMS consisting of the TENG, PENG and micro cantilever, aiming at realizing the technology convergence of active actuation and sensing for the movement of the micro cantilever. The self-powered MEMS/NEMS in this project has great advantages of no external power source, energy-efficient and multifunction integrated over the traditional micro-nano actuators and sensors. The new mechanism can be applied to actuate and measure the micro-structural movement in the fields of micro-nano robots, optical switches and internet of things, which has great significance for the application of independent and sustainable self-powered MEMS/NEMS devices.