扫描探针显微镜是纳米科技领域的重要仪器，也是纳米制造领域成本低、应用灵活的加工设备。然而，当前基于SPM的纳米加工技术面临加工速度慢、加工质量难以控制的瓶颈，而且这些问题无法单纯通过硬件的提升加以解决。本项目拟提出通过SPM探针的超声波高频振动来实现对硬材料的直接加工，并对其中的关键控制问题开展研究以实现高速高质量的纳米制造。主要研究内容包括探针的最优路径规划、大位移下高速纳米定位与控制、硅与硬金属（例如铝和钨）表面的纳米加工试验、高频探针与试品表面的作用机制等。预期获得既满足输入信号幅度与能量约束又满足非最小相位系统非周期信号跟踪要求的多目标路径规划方法、既能有效避免探针在轨迹跟踪移位切换处的振荡又能补偿压电驱动器磁滞耦合动态的精密定位与控制方法及其控制器硬件实现。这些研究成果不仅将促进SPM水平的提高，实现硬材料的快速纳米加工，而且有望应用于包括远端加工、机器人在内的其它精密控制领域。

As an enabling tool in nanotechnology and nanosciences, scanning probe microscope (SPM) has also being explored as a low-cost and highly versatile means for probe-based nanomanufacturing(PBN). SPM-based PBN, however, is currently limited by two major challenges: low throughout and poor fabrication quality control. Motivated by these challenges that cannot be resolved solely through hardware improvements, this project aims to exploit ultrasonic-probe-vibration of the probe to enable direct nanofabrication and nano-patterning on hard materials including metals, and create advanced control techniques to achieve high-speed, high-quality PBN. The proposed control approach comprises optimal path planning of the probe, high-speed nanopositioning and control over large displacement range, implementation in nanofabrication on silicon and hard metal (e.g., aluminum and tungsten) material through experiments，and study of the mechanism behind the interaction between the ultrasonic-vibration probe and the sample. This project will address the challenging problems of multi-objective optimal path planning and path following control that accounts for not only the input amplitude and energy constraints, but also the non-periodic tracking-transition switching of non-minimum phase systems that occurs in applications such as PBN, tele-operations, and robotic manipulations. The proposed control techniques will not only avoid post-transition oscillations during the tracking-transition switchings, but also account for the hysteresis-dynamics coupling of piezo actuators. The outcome of this research will not only enable and lift SPM for high-throughput hard material PBN, but also generate a broad impact on a wide variety of precision control applications, including tele-operatoin, robotic manipulation, and additive advanced manufacturing.