Ti涂层电镀金刚石微磨具的复合制备方法及磨损机理研究

Micro-grinding tools are vulnerable to be affected by high frequency impact due to the characteristics of micro-grinding. The abrasives on the tool surface are easy to wear or even fall off. It has become one of the bottleneck problems that restricting the applied range of the micro-grinding technology and ensuring the processing surface quality. The abrasive wear resistance is improved and the binding force between abrasive and substrate is enhanced by coating technology, which can effectively extend the service life of micro-grinding tools. The compound technology of "Electroplating-MAIP-Heat treatment" was applied to prepare the new type electroplated diamond micro-grinding tools of Ti coating in this project. The preparation technology and coating adhesion mechanism of the coated micro-grinding tools are explored. The influence rules on coating processing parameters to the coating composition, surface morphology, coating thickness and the binding force of abrasive and substrate are analyzed. The optimum processing parameters of coating are acquired. The effects of different factors on the machining quality of the coated micro-grinding tools are researched. The force and thermal coupling rules of the coated micro-grinding tools in micro-grinding are analyzed by the finite element simulation. The special composite wear mechanism of the coated micro-grinding tools is explored by molecular dynamics simulation, and the service life prediction model is established that to evaluate the comprehensive grinding performance of the coated micro-grinding tools. The research results of this project provides an important theoretical basis and original data reference to reduce the wear of electroplated diamond micro-grinding tools, prolong its service life and optimize the grinding processing technology.

微磨削加工的特点决定了微小磨具易受到高频的冲击力，表面磨料容易磨损甚至脱落，成为制约微磨削加工工艺应用范围和保证加工表面质量的瓶颈问题之一。涂层技术可以提高磨料的抗磨损能力并且增强磨料与基体的结合力，从而有效地延长微磨具的使用寿命。项目提出利用“电镀-多弧离子镀-热处理”的复合工艺方法制备镀有Ti涂层的新型电镀金刚石微磨具，探讨新型微磨具的制备工艺与涂层附着机理，分析镀膜工艺参数对涂层组织成分、表面形貌、涂层厚度及膜-基结合力的影响规律，并给出镀膜的最佳工艺参数组合；实验研究不同影响因素对涂层微磨具加工质量的影响规律，有限元仿真分析涂层微磨具受到的微磨削力热耦合作用规律；结合分子动力学仿真探讨涂层微磨具的特殊复合磨损机制，建立其使用寿命预测模型，对涂层微磨具的磨削性能进行综合评价。项目研究成果为减缓电镀金刚石微磨具的磨损，延长其使用寿命和优化微磨削加工工艺提供了重要理论依据与原始数据参考。

项目针对微磨具在磨削过程中受到高频的冲击力而表面磨料容易磨损甚至脱落的问题，利用“电镀-多弧离子镀-热处理”的复合工艺方法制备Ti涂层的新型电镀金刚石微磨具，探讨新型微磨具的制备工艺与涂层附着机理，分析镀膜工艺参数对涂层组织成分、表面形貌、涂层厚度及膜-基结合力的影响，并通过镀膜工艺实验研究弧电流、电磁线圈电压、沉积时间、基底温度和负偏压对涂层性能的影响大小和影响规律，得到提高涂层与基底的结合性能的有效方法，并优化镀膜工艺参数制备涂层微磨具。. 通过大量工艺实验研究涂层与未涂层微磨具的磨削性能，分析了涂层与未涂层微磨具在不同磨削参数下的磨削力及表面粗糙度的变化趋势及规律，研究湿磨和干磨条件下涂层与未涂层微磨具加工工件表面粗糙度和表面形貌的变化规律，利用有限元仿真对涂层与未涂层微磨具的磨削力、热以及磨损情况进行分析比较并与实验结果进行对比验证。系统研究了涂层微磨具的磨损机理及其失效形式，进行涂层与未涂层微磨具的磨损实验研究，测量微磨具不同磨损阶段的直径变化情况，统计微磨具磨粒的磨损和破损比例，分析工件表面形貌与微磨具磨损过程的关系，对比涂层与未涂层微磨具的使用寿命和磨削加工表面的质量，建立单颗磨粒磨损比例模型，推导涂层微磨具磨损体积公式判断和预测涂层与未涂层微磨具的使用寿命，对涂层微磨具的磨削性能进行综合评价。项目研究工作和成果对于涂层微磨具的制造和应用具有重要意义。

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