微细型腔密集结构的电火花加工精度保障技术研究

微细型腔密集结构电火花加工精度的稳定性和可靠性是制约其实用化产业化和应用范围的技术瓶颈。本项目针对这一技术瓶颈，开展微细型腔密集结构的电火花加工精度保障技术研究。主要研究微细旋转电极的精密定位、可靠夹持、微驱动以及在线蠕动进给补偿技术，研制微细旋转电极在线蠕动进给补偿精密气浮主轴装置及其控制系统，解决发达国家对我国技术封锁和禁运问题；研究高精度微能脉冲电源技术、浮动阈值放电状态检测技术和放电间隙特性；研究工作液介电特性及其流场特性对微细电极和微细型腔加工精度的影响；研究微细型腔密集结构的电火花加工工艺和电极损耗规律，建立其损耗数学模型，研究电极损耗补偿技术，以提高和保障微细工具电极和微细型腔密集结构的加工精度。.本项目开展的微细型腔密集结构电火花加工精度保障技术研究，对提高我国微细型腔电火花加工技术的研究水平，拓宽微细型腔密集结构的应用领域，促进微纳制造业的发展，具有十分重要的现实意义。

The stability and reliability of dense micro-cavity structure machining accuracy in micro-EDM are the bottleneck of its industrialization and application. A research on guaranteeing precision of micro cavity machining in micro-EDM has been advanced. The technology of precision positioning, reliable clamping for rotating micro-electrode, the micro actuation technology, the online creep feed compensation technology have been adopted to develop micro rotating electrode online creep feed compensation precision air spindle device and its control system, and it can solve the technology blockade and embargo of developed countries to our country. In the field of pulse power, a high precision micro pulse power should be developed to satisfy the demands of micro cavity machining. The floating threshold detection technology and the characteristics of discharge gap for this micro pulse power also have been studied. The dielectric properties and flow field characteristics of working liquid which should be studied have great influences on accuracy of micro cavity machining and micro electrode grinding. And the same time, the project carries on a large number of experiments to study the method of micro cavity machining, and gains the loss law of array cavity in micro-EDM. And then, a loss model is established to help study the wear compensation of micro electrode. After these, we can improve and guarantee the machining accuracy of micro electrode and dense micro-cavity structure..The research on accuracy guarantee of dense micro-cavity structure machining in micro-EDM which the project will do enhances the industrial technical level and research & development ability in the field of micro cavity machining and micro nano manufacturing, and it might widely promote the micro cavity densely distributed structure parts’ application. All the advantages point that the project has a profound and far reaching significance.