高精度的三维微纳加工技术是现代微纳光子学发展的重要基础之一。本项目结合新兴的立体剪纸形变科学，提出研究基于纳米剪纸的二维至三维形变微纳加工及其光子学应用。采用宏观剪纸闭环形变思想，通过聚焦离子束辐照、静电吸引等精准作用，使自支撑的二维纳米图案通过形变、原位构建几何形貌丰富的三维金属表面等离激元结构。通过力学模拟和光学设计，利用结构三维扭曲、晶格对称性等进行调控，实现三维微纳结构在光频波段卓越的光学功能，获得增强光学手性的物理机制。发展大面积的片上纳米剪纸制备工艺，推进相应三维光子器件的应用研究。通过增加额外导电层和施加交变电压，研究静电力驱动下纳米剪纸结构对入射光强度、偏振、相位等性质的动态调制，开展其在可调谐超构表面、动态光学显示等方面的应用研究。研究结果可望为三维微纳光子器件提供新的设计方法和技术途径，进而为微纳光子学的发展提供一种新的研究思路。

High-resolution three-dimensional (3D) micro-/nano-fabrication technologies form an important basis for the development of modern micro-/nano-photonics. Inspired by the emerging 3D kirigami (‘jianzhi’) based shape transformations, this project will study the nano-kirigami based 2D-to-3D micro-/nano-fabrication techniques, as well as their feature applications on micro-/nano-photonics. By adopting the close-loop methodologies of macroscopic kirigami and utilizing precisely the ion-beam irradiations, electrostatic forces, etc., on-site transformations of free-standing 2D metallic nano-patterns into versatile 3D plasmonic nanostructures will be studied. Through deliberate mechanical modeling and optical designing, as well as the control of 3D structural twisting and lattice symmetries, 3D micro-/nano-structures working at optical frequencies will be realized with advanced functionalities. Physical mechanisms for the enhancement of the optical chirality will be explored. Large-scale and on-chip nano-kirigami based 3D micro-/nano-fabrication will be also investigated for potential applications. By adding an additional conductive layer and applying alternating voltages, the dynamic modulation of incident light properties, such as intensity, polarization and phase distribution, will be developed based on the nano-kirigami enabled micro-/nano-structures. Applications such as tunable metasurfaces and dynamic optical displays will be further explored. The studies in this project could provide novel design principles and methodologies for competitive 3D micro-/nano-photonic devices, paving an inspiring way for the advancement of 3D micro-/nano-photonics.