MEMS Fabry-Perot腔可调红外滤波器是实现红外遥感微型高光谱成像光谱仪的关键器件。然而，目前基于多膜层布拉格反射镜的红外滤波器存在应力引起的镜面形变问题，光谱分辨率难以满足应用要求，这成为制约微型红外高光谱成像光谱仪发展的主要技术瓶颈。针对实现红外高光谱MEMS F-P腔光学滤波器，本项目提出一种新型的基于无应力SOI单晶硅器件层制作的MEMS红外亚波长二维孔阵光栅反射镜，并对其进行基础研究，具体内容包括：研究红外亚波长硅孔阵光栅的导模耦合共振效应，阐明光栅反射特性的物理机理；构建光栅悬浮镜的机电耦合工作模型，揭示光栅反射镜在静电驱动下的应力应变分布规律与位移特性；在理论研究的基础上，建立高反射率宽光谱、高平整度且可大范围驱动调谐的MEMS红外亚波长光栅反射镜的设计方法，基于微加工技术制备高光谱分辨率红外滤波器样机，为微型红外高光谱成像光谱仪的发展奠定基础。

MEMS tunable Fabry-Perot optical filter is the key component of remote sensing miniature infrared hyperspectral imaging spectrometers. However, traditional multilayer Bragg reflector based infrared filter suffers stress-induced mirror deformation, causing its spectral resolution cannot meet hyperspectral requirement, which is one of the major technological bottlenecks in developing miniature infrared hyperspectral imaging spectrometers. For the realization of infrared hyperspectral MEMS Fabry-Perot optical filter, this project proposes an innovative 2D infrared sub-wavelength hole-array grating mirror fabricated on a stress-free SOI silicon device layer, and carries out fundamental research including: firstly, investigate the guided mode resonance effect of grating mirror to reveal underlying physical mechanism of its high reflectance; secondly, build the electro-mechanical coupling model of suspended grating mirror to analyze its stress and displacement characteristics under electrostatic actuation; on the basis of above theoretical study, establish design approach for broadband highly reflective MEMS infrared sub-wavelength grating mirror of high parallelism and wide tunability, as well as fabricate a grating mirror based infrared hyperspectral filter prototype, promoting the development of miniature infrared hyperspectral imaging spectrometers.