PZT等钙钛矿氧化物铁电薄膜已经在压电传感、红外探测和信息存储等领域获得了广泛应用，柔性电子器件和可穿戴设备的发展对铁电薄膜及其元器件提出了柔性弯曲、微纳尺度和高灵敏度的新需求。本课题拟研究PZT等柔性弯曲氧化物铁电薄膜及其全无机柔性电子器件，具体内容包括：(1)在SrTiO3基片上制备单晶铁电膜，通过剥离基片获得自支撑柔性单晶铁电膜；在柔性弯曲云母和金箔等基片上制备柔性多晶铁电薄膜。(2)研究无基片自支撑铁电薄膜在消除基片钳制效应之后的压电、铁电和介电等物性；研究柔性铁电膜在不同弯曲应变条件和在重复弯曲过程中的铁电压电性能稳定性和可靠性。(3)研究铁电薄膜敏感元件在弯曲应变下失效机制，研究敏感元件在机械弯曲过程中的断裂机制并设计相应的解决方案。(4)基于柔性压电薄膜制备柔性可弯曲的压电传感器及其电子皮肤等柔性电子器件，用于采集人体运动、心率、血压等生命健康信息。

Oxide ferroelectric films such as PbZr1-xTixO3 (PZT) have been widely used in piezoelectric sensors, infrared detectors and memories; however it is necessary to prepare micrometer-scale flexible oxide films with enhanced piezoelectric properties to satisfy the requirements of all-inorganic flexible electronics and wearable devices. In this project, we will study flexible piezoelectric films (e.g. PZT) and their miniature piezoelectric sensors as follows. (1) Ferroelectric single-crystal films are grown on SrTiO3 substrate and then the flexible self-supporting films are achieved through peeling hard substrate. Besides, flexible polycrystalline ferroelectric films are grown on micrometer-thick mica or gold foil. (2) We will study ferroelectric, piezoelectric and dielectric properties of self-supporting free-standing films without clamping effect from their hard substrate, study the dependence of domains and other microstructure on bending strain of flexible ferroelectric films, and then study the stability and reliability of the repeative bending film. (3) We will study how electric properties cease to be effective during the piezoelectric sensors bending repeatedly, and then study how to avoid sensors breaking during bending. (4) The high-quality piezoelectric sensors and the corresponding electronic skin will be prepared with flexible ferroelectric film, and they will monitor body movement, heart rate, blood pressure and other human health information.