黑磷等新型二维材料展现出极高的载流子迁移率、可调的带隙范围、显著的各向异性等优异的光电性能，为未来微电子和光电子等领域开辟了全新方向。二维材料光学特性和膜层结构参数的精确测量表征，是解释其新颖现象、实现其性能调控和广泛应用的基础。二维材料原子级分层结构和微米级横向尺寸，以及光学各向异性、退偏、不均匀分布等，对现有测量技术提出了新的需求与挑战。为此，本项目提出开展各向异性二维材料成像穆勒矩阵椭偏测量理论与方法研究，通过将穆勒矩阵椭偏仪与高分辨显微成像结合，获取具有亚微米横向分辨的多入射角、多方位角全穆勒矩阵光谱。强调高分辨成像穆勒矩阵在各向异性二维材料椭偏测量机理中的重要性，重点解决各向异性复杂膜层正向光学特性建模、多参数高耦合情况下待测参数鲁棒提取、高分辨成像穆勒矩阵椭偏仪实验平台搭建及测量实验等基础理论方法与关键技术问题，为新型各向异性二维材料科学研究提供一种可视化、精确测量新方法。

Novel two-dimensional (2D) materials, such as black phosphorus, show some outstanding photoelectric properties, such as high carrier mobility, tunable bandgap, and anisotropy, which open up a new direction for future microelectronics and optoelectronics. Accurate characterization of the photoelectric properties and the structure parameters of the 2D materials is basis for the reveal of novel phenomena, performance control and wide applications. The atomic layered structure and micron-scale horizontal size of the 2D material flake always containing optical anisotropy, depolarization, nonuniform distribution, etc. bring big new requirements and challenges to the existing measurement techniques. Thus, in this project, we intend to research on the theory and method of imaging Mueller matrix ellipsometry (MME) for anisotropic 2D materials. We combine the MME and high-resolution microscopy, and intend to achieve the full Mueller matrix measurement at multi incidences and azimuths with sub-micron lateral resolution. The project will focus on solving the problems of accurate forward modeling of ultrathin layers with anisotropy and depolarization, robust parameter extraction under strong parameter coupling, the experimental set-up and experiments. It is expected that the exploratory research in this project will provide a visual metrology for the scientific research of ultrathin 2D materials.