我国MEMS产业正蓬勃发展中，部分国产MEMS产品已进入商业成熟期，一些符合产业需求的新型MEMS器件也大量出现，其对加工工艺的要求进一步提高。这些器件往往使用多层薄膜结构，其热学参数对器件的性能和可靠性有很大影响。随着国际环境的变化，国内MEMS器件设计企业将越来越依赖国内自主加工生产能力，而在线测试是MEMS加工工艺线保证良率的关键技术，因此，十分有必要对MEMS多层薄膜材料热学参数的在线测试方法进行研究。本项目拟在前期的单层薄膜热学参数在线测试研究的基础上，通过对多层薄膜的界面传热特性、复杂条件下应力分布的研究，建立MEMS多层梁电热特性理论模型、温度载荷下吸合效应理论模型和谐振特性理论模型，并以此为理论基础，设计三种新型MEMS多层薄膜热学参数在线测试结构，构建热导率、热扩散系数和热膨胀系数的参数提取公式，最终建立在线测试方法，为我国MEMS工艺线的产业化提供重要的技术支撑和保障。

MEMS industry is developing in China. Some domestically-made MEMS devices have been accepted by commercial market. Many novel MEMS devices have been launched, which renders higher requirements for MEMS fabrication processes. These devices usually have multilayer thin films. The performances and reliabilities of these devices are depending on the thermophysical properties of thin films. As the international situation changes, domestic MEMS enterprises may need more domestic fabrication capacity. In-situ tests are the key technologies to monitor the yield of MEMS processing line. Therefore, it is necessary to study on the in-situ test method for thermophysical properties of MEMS multilayer thin films. Based on our previous researchs on in-situ test technologies for thermophysical properties of single layered thin film, this project will investigate the heat transfer of interface and the stress distribution under complicated conditions. The theoretical model of electrothermal analysis for MEMS multilayer thin films, the analytical model of pull-in effect and resonance characteristics under temperature stress will be derived. Three novel in-situ thermophysical properties test structures for MEMS multilayer thin films will then be proposed, and the extraction model of thermal conductivity, thermal diffusivity and thermal expansion coefficient will be established as well. This project will provide vital technical support for the industrialization of MEMS processing line in China.