随着NEMS/MEMS技术渗透到社会生活的各个领域，其工作的可靠性及稳定性日益受到人们的关注。微纳机电谐振器动力学响应直接影响微纳米产品的工作效果，因而研究清楚微纳机电谐振器的非线性动力学响应与表面效应、吸收分子质量与能量、机电耦合作用等物理和几何量的依赖关系，揭示微纳机电谐振器的物理本质，是成功设计及应用微纳机电器件的关键。本项目将考虑这些主要因素,建立改进的微纳机电系统连续体非线性振动模型、考虑吸收分子效应的多尺度模型。研发简洁高效、高精度的解析逼近技术求解这些模型并判别解的稳定性，揭示微纳机电谐振器结构非线性动力学响应机理。本项目将阐明解析逼近技术构造原理。研究成果可以为微纳机电器件的设计、优化及应用提供理论指导，还可推广用于研究其他结构非线性振动模型的求解与稳定性判别。

With the NEMS/MEMS technology infiltrating into our daily life, stability and reliability of NEMS/MEMS devices have been attracted attention. Dynamical behavior of NEMS/MEMS resonators which are the core assemblies of MEMS/NEMS devices directly affect their performace. Therefore, it is important to understand the relationship of the NEMS/MEMS resonators’ nonlinear dynamical response with surface effect, molecular mass and stiffness due to molecular adsorption, coupled effect of electromechanical field, etc. This project is focused on constructing the improved continuum models of NEMS/MEMS resonators to character nonlinear oscillation, and modeling multiscale/molecular modeling-based simulations, with considering effect of molecular mass and energy due to molecular adsorption. What’s more, this project intends to develop brief and highly accurate analytical approximate technology, in order to solve the presented models and determine the stability, and illustrate nonlinear dynamical mechanism of NEMS/MEMS resonators. Finally, this project would elucidate the principle of establishing analytical approximate solutions. The present results could qualitatively guide design, optimization, and application of NEMS/MEMS devices. Furthermore, the proposed results could also be used to study other structures'nonlinear oscillation models.