高精度复杂曲面坐标测量误差补偿与拼接重构方法研究

高精度复杂曲面广泛应用于国防和工业领域高端装备核心部件中，其精度要求日益提高，甚至达到了亚微米量级。面形测量是制造的基础，传统的干涉测量法测量动态范围有限且只适用于光学镜面的测量，坐标测量法的测量精度还无法满足高精度复杂曲面的要求，主要原因是受限于测量机本身精度和复杂曲面高陡度变曲率等特点会放大测量机误差源的影响。针对上述问题，本项目提出了一种新的误差辨识方法，结合分片拼接测量方式来提升测量机对复杂曲面的测量精度。重点解决多源误差耦合下的测量系统空间误差检定与补偿方法，研究基于多位置的标准球模拟复杂曲面检具来辨识和补偿测量机误差；建立测量机误差源与测量结果的误差映射模型，预测复杂曲面测量精度；引入干涉拼接测量的思想，研究多位姿子区域测量数据全局拼接理论及优化算法，最终实现复杂曲面的高精度测量和误差评价。

High-precision complex surfaces are widely used as core components of high-end equipment in the defense and industrial fields, and the requirement on accuracy is increasing improved, even to sub-micron order. Surface measurement is the basis of manufacturing. Traditional interferometry method has limited dynamic range and is only suitable for measurement of optical mirrors. The measurement accuracy of coordinate measurement method cannot meet the requirements of high-precision complex surfaces, which is mainly limited by the measurement accuracy of the machine itself and the high steepness of complex surfaces amplifying the influence of error source. In view of the above problems, this project proposes a new error identification method, combined with the piecewise stitching method to improve the measurement accuracy. The project focuses on spatial error verification and compensation of the measurement system under the coupling of multi error sources. We research the multi-position standard ball simulating complex surface to identify and compensate the machine error. We also establish the error mapping model between the error source and the measurement result, which can predict the measurement accuracy of the complex surface. Inspired by the interferometry stitching method, the complex surface is divided into several sub-regions with low steepness, and then we study the global stitching theory and optimization algorithm. Finally, through the above research, the high-precision measurement and error evaluation of complex surfaces are realized.