非回转对称表面微透镜阵列超精密铣削精度创成机理与控制方法的研究

在非球面或自由曲面上设计微透镜阵列可实现大视角和精确控制光束，超精密铣削技术可避免快/慢伺服金刚石车削这类元件出现的加工干涉问题。因此，本项目将深入研究非回转对称曲面上微透镜阵列超精密铣削的精度创成基础问题。首先，考虑被加工表面微观不平度建立超精密铣削表面微观形貌仿真和粗糙度预测模型，基于基面几何特征和铣削误差建立非回转对称曲面上微透镜阵列加工误差分布模式，阐明铣削精度形成机理，获得铣削精度一致性保障方法。其次，探寻基面微观形貌、几何误差与微透镜铣削精度的关系，建立基面和微透镜阵列铣削集成优化方法。最后，阐明微透镜阵列铣削误差值和误差分布模式对光学性能的影响机制，确立精度一致性判断准则，形成面向功能评价的微透镜阵列超精密加工方法。本项目的研究成果将促进微铣削机理和纳米表面生成理论的发展，为高精度复杂形状的微透镜阵列提供可靠、高效的超精密加工技术，在光学、医学、军事等领域具备良好的应用前景。

The design of microlens array (MLA) on an aspherical or a freeform surface achieves a larger view angel and a more precise control of light. There is machining interference for the fabrication of this kind of components by the single point diamond turning with FTS/STS, which can be avoid by the ultra-precision milling (UPM) technology. Therefore, this project makes a further study on the generation mechanism for the resultant accuracy in ultra-precision milling of MLA on non-rotationally symmetrical surface. Firstly, effect of micro-topography of the machined surface on the surface generation in UPM is investigated to build the 3D surface topography simulation model and surface roughness prediction model. Under consideration of the geometrical information and the form error of the substrate, the error distribution mode for the ultra-precision milled MLA on a non-rotationally symmetrical surface are developed and the control methodology for the milling precision consistence are set up. Secondly, the relationship between the geometries and errors of the substrate and the machining accuracy of MLA is built to develop the integrated optimization methodology for the ultra-precision milling of substrate and MLA. Lastly, the influences of the errors values and the errors distribution patterns of the ultra-precision milled MLA on the optical quality are investigated in this project to build the judgment criterion for the consistence so as to provide a functional-driven ultra-precision machining method for MLA. Therefore, this study will not only promote the further development of the micro milling mechanism and nano-surface generation theory, but also serve as a tool to provide an effective and efficient ultra-precision machining technology for the fabrication of high precision complex optical MLA, which provides good application prospects for MLA in optical, medical and military areas.