针对目前的纳米液滴催化生长刻蚀只能制造简单的一维结构（纳米线、纳米沟道），而难以制造复杂纳米结构的不足，本项目提出一种将“液滴催化生长刻蚀”和“液滴操纵”相结合的可控液滴催化生长与刻蚀纳米加工方法，即在纳米液滴催化刻蚀生长过程中，操纵具有催化作用的液滴运动，实现可控催化生长和可控催化刻蚀。相比于传统纳米液滴催化生长刻蚀、以光刻为主的纳米加工等方法，该方法具有可制造复杂的纳米结构、加工工艺过程简单、成本低和高加工分辨率的特点。本项目将对可控液滴催化生长与刻蚀纳米加工方法的机理、原理验证和规律方面进行研究，构建可控液滴催化生长与刻蚀纳米加工实验平台，实现对硅、石墨烯等材料的纳米级加工。该研究将为半导体材料和纳米材料结构的制造提供新的理论方法和实现技术，将对新型纳米器件的发展具有重要推动意义。

In order to overcome shortcoming of nano droplet catalytic deposition and etch method at present, which is difficult to fabricate Complex nanostructures , the project proposes a novel controlled droplet catalytic deposition and etching’s nanofabrication method, merging “droplet manipulation” and “droplet catalytic growth or etching”, specifically, manipulating droplet to realize controlled droplet catalytic deposition or etch during droplet catalytic growth or etching. Compared to other nanofabrications such as traditional nanodroplet catalytic deposition and etch and photolithography, the method has lots advantages such as being able to fabricate complex construct, process simplicity, short processing cycle, low cost.The project will research mechanism, validation of principle and rule of controlled droplet catalytic deposition and etch nanofabrication method, and build experimental platform to nanofabricate materials such as silicon,   graphene. The research will provide new theoretical method and realization technology for semiconductor materials and nanomaterials manufacturing, and is important to the development of new nanodevice.