异质结HIT太阳能电池结合了常规晶硅电池高转化效率、高稳定性与非晶硅薄膜电池低温生长工艺的优点，是当今太阳能电池研究的一个热点。针对松下公司对HIT电池尤其是利用PECVD制备高质量无损伤非晶硅薄膜的技术封锁，本项目提出一种可避免等离子体损伤的温和等离子体沉积方案，即非平行板式电容耦合等离子体（CCEP）沉积技术。研究内容主要包括（1）实现稳定的CCEP容性放电，研究等离子体对衬底表面造成损伤的物理机制；（2）基于CCEP制备本征和掺杂非晶硅, 研究其微结构及其在n型晶硅表面的钝化效果;（3）制备并研究单结HIT太阳能电池的性能，采用嵌入金纳米颗粒的方法改善前端电极的输运特性，研究等离子体损伤对电池性能的影响。本项目提出的CCEP沉积技术通过降低等离子密度及约束正离子运动方向，有望抑制沉积过程中等离子体对衬底表面的损伤，提高晶硅表面钝化效果，为制备高效HIT太阳能电池提供理论和技术支持。

Si-based heterojunction with intrinsic thin-layer (HIT) solar cells, which combines the advantages of high conversion efficiency and high stability of crystlline silicon solar cells with that of low-temperature process of thin film solar cells, is a hot topic in current research in solar cells. Against the technology blockade of Panasonic (Sanyo) company on HIT solar cells, especially on how to achieve high-quality and low-damage amorphous silicon (a-Si:H) thin films using PECVD, a novel soft plasma deposition technique without plasma damage namely capacitively coupled electrodeless plasma (CCEP) is proposed in the present proposal. The mnain contents include: (1) realize stable CCEP discharges at capacitive mode (E-mode) and study the physical mechanism of crystalline silicon (c-Si) surface damages induced by plasma; (2) fabricate intrinsic and doped a-Si:H layers based on CCEP technique and investigate their microstructure characteristics and their passivation performances for n-type c-Si surfaces; (3) prepare n-type crystalline silicon single junction HIT solar cells based on CCEP technique and study cell performances,and improve the electrical transport property of the front electrode interfaces by inserting Au nanoparticles, and study the influence of the plasma damage on cell performances. This project is a basic research of application. The proposed CCEP technique is expected to suppress the plasma damage onto the substrate surface by both lowering the plasma density and limiting the movement of ions. This may provide theoretical basis and technical support for realizing excellent surface passivation of c-Si substrates and achieving high-efficiency HIT solar cells.