透明导电氧化物(TCO)薄膜广泛应用于薄膜太阳能电池领域，主要要求其具有良好导电性和高透光率。由于薄膜太阳能电池的有源层较薄，难以实现对入射光的充分吸收。在TCO薄膜表面制备光栅结构，利用光栅的多重散射作用增加入射光的光程，可使入射光被有源层充分吸收，从而有效提高薄膜太阳能电池的光电转化效率。本项目针对掺铝氧化锌(AZO)薄膜表面高分辨率光栅结构制备的难题，拟通过在AZO薄膜表面引入金属层，并采用超声辅助激光诱导的方法来实现光栅结构的制备。研究超声参数和激光参数与光栅结构形成之间的关联，总结归纳金属/AZO薄膜表面光栅结构形成的条件和关键影响因素，提出光栅结构的形成机理；通过性能测试与分析，获得薄膜光电性能随实验参数变化的规律性描述，确定可优化薄膜综合光电性能的最佳工艺参数。本项目的研究可为TCO薄膜性能优化提供新的研究思路和方法，为高性能透明导电薄膜材料的开发与应用奠定基础。

Transparent conducting oxide (TCO) thin films are widely used in thin-film solar cells to meet the requirements of good conductivity and high transmittance. Due to the thinner active layer in a thin-film solar cell, full absorption of incident light can hardly be achieved. Fabricating grating structures on the TCO film surface will contribute to full absorption of incident light by the active layer, owing to the multiple scattering effect of the gratings that can increase the optical path of the incident light. As a result, the photoelectric transformation efficiency of the thin-film solar cell will be effectively enhanced. Since fabrication of high-resolution grating structures on an aluminium-doped zinc oxide (AZO) film surface is difficult, this project will introduce a metal layer on the AZO film surface and apply a ultrasonic-assisted laser inducing method to achieve the fabrication of grating structures. The correlation between ultrasonic or laser parameters and the formation of grating structures will be investigated. The forming condition and the key influence factors of the grating structures on the metal/AZO film surface will be summarized, and the formation mechanism of the grating structures will be proposed. By measuring and analyzing experimental data, the variation rule for the photoelectric properties of the film with experimental parameters will be obtained, and the optimum technological parameters for optimizing the overall photoelectric property of the film will be determined. The project will provide a novel research idea and method for performance optimization of TCO films, and lay a solid foundation for development and application of high-performance transparent conducting thin film materials.