量子点结构能显著改善半导体量子阱结构发光器件的效率衰减问题，采用量子点结构设计已成为研制新型高效发光器件的有效手段。目前，氧化物半导体发光应用成为国际研究热点。但用作有源层的氧化物半导体量子点可控制备仍有许多难题需要解决。本项目以新型宽带隙光电功能材料氧化锌的量子点结构为研究对象，利用量子点结构本身的尺寸限制以及氧化锌所具有的更宽带隙隔离层的势阱限制，结合多层量子点之间的耦合，设计和制备多层氧化锌基自组装量子点结构。通过控制氧化锌量子点生长和掺杂的过程，制备一系列尺寸可控、形貌均匀、带隙可调的单层和多层量子点；通过控制隔离层的组分、厚度以及退火处理等参数，研究各种因素对隔离层与量子点界面处的应力状态和量子点发光性能的影响，从而实现对多层结构量子点界面状态的调控；对多层量子点结构的层数和厚度等参数进行优化，提升多层氧化锌基量子点结构的发光效率，推动其在新型高效发光二极管中的应用。

Quantum dots are promising structures used to overcome the "efficiency droop" of semiconductor light-emitting devices with quantum well structures. And the applications of oxide semiconductor on light-emitting devices have attracted much attention in recent years. However, there are still many problems to be settled about controllable growth of oxide quantum dots that can be used as the active region in a light-emitting diode. The plan of this project is to grow self-organized ZnO quantum dots in monolayer or multilayer, and investigate their luminescence properties. The very small size of ZnO quantum dots can induce quantum confined effect. And a barrier layer with wider band gap such as ZnMgO can introduce further confinement. Then carriers can be confined in the quantum dots and the efficiency of radioluminescence can be enhanced. When ZnO quantum dots are grown in multilayer with barriers between each layer, there could be coupling between quantum dots of different layers, and the luminescence efficiency can be improved further. Besides growing a series of ZnO quantum dots with uniform size and morphology in monolayer or multilayer, we intend to modulate the band gap of ZnO quantum dots by alloying, in order to increase the potential confinement and realize luminescence enhancement. In this project we will also investigate the stress states of the interface between quantum dots and the barrier layers which could affect the luminescence properties, by means of tunneling the component, thickness of the barrier layer and adopting post-growth annealing. The investigations of growth and luminescence properties of self-organized ZnO quantum dots can promote the applications of ZnO optoelectronic devices.