中空微纳结构可有效提高气敏材料的比表面积与孔隙率，表面施主缺陷可增强材料的反应活性，而如何制备同时具有这些特征的半导体气敏层是一个难题。本项目提出复合软模板—液料等离子喷涂（CST-LPS）新方法：首先构筑稳定复合软模板以富集/固定金属离子，然后通过碱源作沉淀剂制备形貌和尺寸可控的中空微纳结构前驱体液料，接着利用液料等离子喷涂技术将前驱体液料沉积在电极表面获得具有高比表面积、高孔隙率、高表面施主缺陷浓度的气敏层。首先研究复合软模板的构建与合成，阐明关键因素对纳米粒子排列和界面结合的影响规律；其次研究等离子喷涂中空微纳结构材料的沉积特性，阐明涂层结构的调控机制；最后研究该涂层的室温气敏特性，建立并完善涂层形貌、微观结构及施主缺陷与气敏性能的关联机制。阐明CST-LPS的涂层沉积机制及室温气敏机理，不仅对研发高性能室温气敏层具有重要意义，也为其它功能涂层的设计和制备提供新思路。

Hollow micro-nanostructure can effectively enhance the specific surface area and porosity of gas sensing materials while the donor defects at the surface can increase the reaction activity of the materials. How to prepare semiconductor gas sensing layers which own these features is a difficult problem. This project proposes a new composite soft template-liquid plasma spray (CST-LPS) method: The stable composite soft template will be fabricated firstly to gather/fix metal ions, then synthesize the hollow structured precursor with controllable morphology and size by using alkali source as precipitant. After that, the sensing layers with high specific surface area, high porosity and high donor defect concentration will be deposited on the surface of electrodes via liquid plasma spray. The construction and synthesis of composite soft template will be studied firstly, clarifying how those key factors affect the arrangement of nanoparticles and the combination at the interfaces; secondly, the deposition characteristic of plasma sprayed hollow materials will be investigated and the regulatory mechanism of the coating structures will be illuminated; thirdly, the gas sensing properties of the coatings at room temperature will be studied, establishing and completing the correlative mechanism between the morphology, microstructure, donor defect concentration of the coatings and its gas sensing properties. The illumination of the deposition mechanism and room-temperature gas sensing mechanism of CST-LPS coatings will not only be of importance to the research and development of room-temperature gas sensing layers with high performance, but also can provide new ideas for the design and fabrication of other functional coatings.