硅基片上布里渊激光振荡的新机理新技术研究

硅基光电子集成芯片在微波光子学、光互连等领域有着广阔的应用前景，而与CMOS工艺相兼容的硅基激光光源已成为当前研究的热点与难点。本项目拟对微纳结构的硅基片上布里渊激光振荡的新机理新技术展开研究。研究在光力影响下硅基声光复合波导谐振腔布里渊激光振荡的新机理，分析声场、光场的传输特性对激光振荡性能的影响，设计出可硅基集成且与CMOS工艺相兼容的激光光源。研究SiO2声子晶体波导和Si3N4光波导相结合的复合波导，实现对声子晶体波导和光波导色散曲线的独立调控，抑制声场的泄漏，完善对声场和光场的共同束缚，增强受激布里渊散射效应。研究基于声光复合波导的跑道型微环谐振腔，揭示硅基微纳结构谐振腔中布里渊激光振荡的演变规律。研究硅基声光复合波导谐振腔布里渊激光振荡的调控机制，实现灵活可调的布里渊激光器。研究声光复合波导谐振腔的制备工艺，并制备出硅基片上布里渊激光器，为实现硅基激光光源提供一条有效的途经。

Silicon-based optoelectronic integrated chips have wide applications in the areas of microwave photonics and optical interconnect. Moreover, silicon-based laser sources, compatible with the CMOS technology, have become the current research hot spot and hard point. This project will investigate the novel mechanism and techniques of Brillouin laser oscillation on silicon-based chip with micro-nano structures. We will study the novel mechanism of Brillouin laser oscillation in silicon-based acoustic-optical hybrid waveguide resonator under the effect of optical forces to analyze the influences of transmission characteristics of acoustic wave and optical fields on the laser oscillation properties, and hence to scheme out silicon-based integrated and CMOS compatible laser sources. We will research into the hybrid waveguide with the combination of SiO2 phononic crystal waveguide and Si3N4 optical waveguide to independently regulate dispersion curves of optical waveguide and phononic crystal waveguide, to suppress the leakage of acoustic fields, to improve the common confinement to acoustic wave and optical fields, and to enhance the stimulated Brillouin scattering effect. To reveal the evolution discipline of Brillouin laser oscillation in silicon-based micro-nano structure resonator, the racetrack-liked micro-ring resonator based on acoustic-optical hybrid waveguide is investigated. We will also study the manipulation mechanism of Brillouin laser oscillation in silicon-based acoustic-optical hybrid waveguide resonator to achieve flexible and controllable Brillouin laser. We will investigate the fabrication techniques of acoustic-optical hybrid waveguide resonator and fabricate the silicon-based chip Brillouin laser. This research will provide an effective approach to implement silicon-based laser sources.