Cu2ZnSnS4(CZTS)薄膜具有高光吸收系数，带隙与太阳光谱匹配，适合作为太阳能电池吸收层。CZTS薄膜的元素比例及分布是影响电池光伏特性的关键因素，但目前对CZTS薄膜的组分变化机制及相关的硫化反应机制尚未阐明。本项目采用磁控溅射和后续硫化法制备CZTS薄膜，用XPS、SIMS等方法测试组分特性，再结合结构、形貌等特性分析硫化机制，由硫化机制解释组分变化。本项目分别研究衬底材料、前驱体和高温硫化条件对薄膜组分特性和硫化反应机制的影响。首先研究在不同衬底上制备CZTS的组分特性和硫化机制的差异；再分析前驱体的结构特性和金属分布对后续的硫化反应和组分特性的影响；最后采用耐高温的石英玻璃或钼箔衬底，研究CZTS薄膜在超过600℃的高温硫化时的分解及其逆反应对组分的影响。本项目研究可更全面地揭示CZTS薄膜的组分变化机制、硫化反应生成和分解机制，为制备高效率的CZTS太阳能电池提供指导。

The Cu2ZnSnS4 (CZTS) thin film is suitable as absorber of solar cell due to its high absorption coefficients and band gap matching with solar spectrum. The ratio and distribution of elements in CZTS thin film are key factors affecting the photovoltaic properties of solar cell. However, the mechanisms of composition change and the related sulfurization mechanisms are still not clear now. In this project, the CZTS thin films are fabricated by magnetron sputtering and post sulfurization. The compositional properties of CZTS thin films are measured by XPS, SIMS, and other methods. The sulfurization mechanisms are analyzed by the combination of the compositional, structural, and morphological properties of CZTS thin films. The ratio changes of CZTS thin films are explained by the sulfurization mechanisms. We intend to study the effects of substrates, precursors, and conditions of high temperature sulfurization on the compositional properties and sulfurization reaction mechanisms of CZTS. First, the differences in compositional properties and sulfurization mechanisms of CZTS on different substrates are studied. Then, the influences of the structural characteristics and metal distribution of precursors on the post sulfurization reaction and compositional properties are analyzed. Finally, the heat-resistant quartz glasses or molybdenum foils are used as substrates. The CZTS thin films are sulfurized at temperature higher than 600 ℃. The effects of decomposition reaction and its reverse reaction on the compositional properties of CZTS are analyzed. This project is expected to get a wider understanding of the mechanisms of composition change and the sulfurization mechanisms of formation and decomposition reaction of CZTS thin films. It can provide guidance for the preparation of CZTS solar cell with high conversion efficiency.