材料表面微纳结构能够对光进行调制和变换，从而实现光波发射、传输、变换和接收等功能，可应用于多种微光学元件的设计与制备。传统硅基等材料表面微纳结构受到基体材料性质的限制，无法在外界驱动下发生变形，光学性能单一，不能满足微光学领域对光学性能可调控的进一步应用需求。本项目选择具有形状回复能力的形状记忆聚合物(SMP)材料作为柔性衬底，通过合理的材料改性，提高材料的可加工性、光学透明度；优化制备工艺参数，结合光刻技术、浇筑成型和纳米热压印工艺构筑多种可灵活变形的SMP表面微纳结构，实现程序化控制光学性能的功能；进行可调谐微纳结构光学元件的设计和研制，对相应的工作机理进行热力学理论和变形仿真分析；设计搭建可调谐微光学元件的光学性能检测系统，研究制备和调谐过程中的材料性能转换与微纳结构的形成和演化，分析表面微纳结构的变形特性和光响应规律，为设计和制备柔性可调谐微光学器件提供有利的理论和实验支撑。

Surface relief micro/nanostructures that are capable of optical wave front modification are implemented in micro optical components to alter the phase of the light propagating through them. The micro/nanostructures are usually structurally rigid and non-deformation by external stimuli due to the durable and non-deformable substrates’ materials, such as glass, fused silica, quartz et al. The deformable and adaptive optics are desired to allow real-time optimization of their optical performance and has emerged as an exciting research area in micro-optics. Shape memory polymer (SMP) can be used to fabricate tunable micro-optical components with the shape recovery ability to switch between as-fabricated and programmed micro/nanostructures. Through analysis of various match functional materials, the SMPs with suitable glass transition temperature and superior optical characteristics are chosen as flexible base materials. Through properly adjusting selection of materials’ reasonable ratio, the modified SMP possesses high transparency, good toughness, adjustable glass transition temperature, easy to forming. The flexible and tunable micro-optical components with micro/nanostructures are designed and developed, and the corresponding tunable deformation mechanism is studied by the thermodynamic theory and simulation analysis. By optimized the processing technique of surface micro/nanostructures, various tunable micro-optical components with programmable surfaces micro/nanostructures are prepared by facile pouring and hot embossing process. A measurement system for testing the optical properties of the tunable micro-optical components is designed and built. The materials performance’s conversion and the forming and developing of the micro/nanostructures, are investigated during the preparation and tunable process. The relationship between the deformation ability of micro/nanostructure and optical property response is demonstrated. Facile lithographic replication and suitable materials offer exciting opportunities for the fabrication of flexible and tunable micro-optical devices to promote the development of adaptive photonic devices.