金属复合材料微型件相较于单金属微型件拥有更加优越的综合性能，在微电子机械系统领域有着非常广泛的应用。本项目以铜/铝层状复合箔材为研究对象，采用微柔性轧制技术对其在微尺度下进行纵向变厚度轧制，制备新型连续变厚度复合材料微型件。采用理论与实验相结合的方法，沿组元材料耦合作用机理和异质界面协调变形机制两条路线开展研究。通过研究工艺条件、组元材料特征尺寸及晶粒取向对轧件变形行为的影响，揭示组元材料在微柔性轧制下的耦合作用机理；通过研究复合箔材界面特征的变化规律，揭示微柔性轧制下异质界面的协调变形机制；构建复合箔材宏观变形行为与微观作用机制之间的关系模型，揭示复合箔材微柔性轧制下的变形机理。研究成果可为高质量复合材料微型件的制备提供有力理论与技术支撑，对促进微柔性轧制理论创新，推动我国微制造技术及知识体系的发展具有重要意义。

Metallic composite micro components possess much better overall performance compared to those made of a single metal, and are widely used in the micro-electromechanical system (MEMS). This project takes Cu/Al laminated composite foils as the research objects, and micro flexible rolling technology is applied to produce a new product of composite micro components through longitudinal variable gauge rolling of the composite foils in microscale. Combining theory and experiments, the research is conducted following two research routes, i.e. coupling relationship of component materials and compatible deformation mechanism of heterogeneous interface. The effects of processing condition, feature size of component materials and grain orientation on the deformation behavior of rolled workpiece are studied, and the coupling relationship of component materials in micro flexible rolling are obtained. The characteristics of heterogeneous interface change are studied to understand the compatible deformation mechanism of heterogeneous interface in micro flexible rolling. By establishing the relationship between macro deformation behavior and micro mechanism of composite foils, the deformation mechanism of composite foils in micro flexible rolling is finally revealed. The outcomes are expected to provide strong theoretical and technical supports for the production of high quality composite micro components, and are significant for promoting innovation of micro flexible rolling theory, as well as development of micro manufacturing technology and knowledge hierarchy of our country.