低功耗微机械(MEMS)加速度计是可穿戴设备等新兴物联网(IoT)应用的关键传感器之一。相比于传统工业应用，可穿戴应用要求MEMS加速度计的尺寸和功耗进一步缩微，这给读出电路的噪声能效设计提出了新的挑战。本项目面向低功耗高噪声能效的设计需求，探索MEMS传感单元尺寸缩微和CMOS读出电路功耗缩微下读出电路的噪声能效过低问题，提出一种动态激励电压控制读出技术。该技术去除了传统静态激励读出技术中使用的高功耗驱动放大器并提升了激励电压，从而显著提升噪声能效。但是动态激励会带来额外的精度恶化问题，本课题将围绕该问题展开研究：首先，研究动态激励带来的非线性响应、漂移和噪声模型，然后研究补偿动态激励漂移和噪声的关键电路技术以及高噪声能效电容-电压变换器设计技术，最后在应用中考察能效提升与设计折衷。本项目对应用于可穿戴领域的低功耗MEMS加速度计的发展有着重要意义

Low power Microelectromechanical (MEMS) accelerometer is one of the most important sensors for the emerging internet of things (IoT)applications such as wearable devices. The circuit design technique of MEMS accelerometers for traditional industrial applications is going to be mature. However, there still exists new challenges in MEMS accelerometer for wearable devices applications. This is due to both the size and power consumption of the MEMS accelerometer needs to be scaled down aggressively. In this project, a novel dynamic-excited voltage control (DVC) readout technique for MEMS accelerometer is proposed, in order to deal with the problem of insufficient noise-power efficiency due to the scaling down of the size of MEMS sensing element and the power consumption of CMOS readout circuit. The proposed DVC readout technique in this project meets the demands of low power consumption and high noise-power efficiency readout circuit design. By replacing the high-power driver used in the traditional static-excited readout circuit with the dynamic excitation, the DVC readout technique reduces the power consumption and improves excitation voltage, leading to the improvement of noise-power efficiency of the readout circuit. However, dynamic excitation introduces the problem of accuracy degradation which is the topic in this project. The research contents are as follows. Firstly, the effects of dynamic excitation on the nonlinearity, drift and noise performance of MEMS sensing element are to be studied. Secondly, the innovative circuit design technique to reduce the effect due to the dynamic excitation are to be studied. Thirdly, the design trade-off and optimization of the proposed readout circuit in the practical application needs to be studied. This project is of great importance to the development of low power and high noise-power efficiency MEMS accelerometer for wearable devices applications.