电子背散射衍射(EBSD)技术作为一种进行纳米尺度材料显微组织结构分析的强有力工具，在用于未知相的鉴定方面一直非常困难。如果能最大限度地提取出衍射花样中的信息，那么EBSD技术不仅在进行已知相的识别，而且在进行未知相的鉴定方面都将达到一个全新的高度。本申请项目以解决怎样精确模拟EBSD衍射花样的相对强度这一关键问题为目标，通过采用适应于低能电子动力衍射模拟的多片层方法，充分考虑各种客观因素（如：背散射电子能量展宽、各向异性背散射和弹性散射过程中样品的吸收等）的影响，精确模拟全尺度的EBSD图，获得进行精确相鉴定所需的晶体点阵常数，开发出具有高精度相鉴定功能（对已知相进行识别，对未知相进行鉴定）的EBSD分析软件。

Electron Backscatter Diffraction, as a powerful tool for the analysis of crystalline material on the nanometer scale, is still very difficult in determining the unknown phase of the sample. If the maximum amount of information can be extracted from the experimental electron backscatter diffraction (EBSD) patterns, the EBSD technique will be arrive in a new limits for identifying and determining phase. The object of this project to solve the key problem about how to simulate the relative intensities of EBSD patterns precisely. By considering the influence of the energy spectrum of the backscattered electrons, the dynamical effection of anisotropic backscattering and the loss of electrons from the initial population due to inelastic effects, the full scale EBSD patterns will be simulated and the precise lattice parameter of the sample will be obtained using an accurate Multislice method for low-energy transmission electron microscopy. A new software package of EBSD analysis will be established with the function of phase identification and determination precise.