三维叠层微电极振动辅助电解加工及其台阶效应与质量控制

The project proposes a novel method of vibration-assistant electrochemical micromachining(EMM) with 3D laminated micro-electrode. In this method, 3D laminated micro-electrode is adopted for EMM to obtain 3D micro-cavity structure. In EMM, 3D micro-cavity structure is generally fabricated by layered milling of micro column electrode. Compared with this conventional method, 3D micro-cavity structure can be simply obtained by one-way feed machining of 3D micro-electrode. Moreover, the section area of 3D micro-electrode is much bigger than micro column electrode. Therefore, compared with micro column electrode, 3D micro-electrode has higher anti-interference ability, higher efficiency and simpler machining process and can be used to process the 3D micro-cavity structure with higher depth-to-width ratio...In order to master the forming laws of this method and ensure the machining accuracy, the project plays a positive meaning of step effect of 3D laminated micro-electrode to sputter outside wall insulating film, and accomplishs the quantitative characterization of step effect and machining gap in the fabrication of 3D micro-cavity. For revealing the forming mechanism of this method and ensuring the process with stability and efficiency, the project will study the piston effect and vortex effect of EMM flow field under the action of step effect of 3D laminated micro-electrode, vibration frequency, amplitude, feed speed and so on. For ensuring the processing results with high surface quality and corrosion resistance, the project will investigate that the evolution law of passive film organization structure in different position of micro-cavity. The project will open up a new method and research field of EMM.

本项目首次提出一种三维叠层微电极振动辅助电解加工方法，该方法应用叠层成形的三维微电极进行电解加工；与目前主流的微柱状电极分层电解铣削加工的工作方式相比，三维叠层微电极只需进行单向进给式加工便可获得三维微型腔；三维叠层微电极比微柱状电极截面积大得多，因此抗干扰能力强，运行简单高效，可完成大深宽比三维微型腔的加工。.本项目发挥台阶效应的正面意义、解决三维微电极外侧壁绝缘膜溅射问题，以此为基础详细研究三维叠层微电极电解加工微型腔的台阶效应和加工间隙的定量表征，掌握该方法的成形规律，从而保证高加工精度；聚焦研究振动频率、振幅和进给速度等工艺参数与三维叠层微电极台阶效应共同形成的特殊电解加工流场的活塞效应与旋涡效应，揭示该方法的成形机理，从而保证加工稳定高效；深入研究微型腔不同位置钝化膜材料组织结构的演变规律，从而保证加工结果的高表面质量与抗腐蚀性能。本项目将开拓一种全新微细电解加工方法和研究领域。

本项目提出一种三维叠层微电极振动辅助电解加工方法，与目前主流的微柱状电极分层电解铣削加工的工作方式相比，三维叠层微电极截面积大得多，因此抗干扰能力强，且只需进行单向进给式加工便可获得复杂三维微型腔。.本项目在电解液中加入B4C粉末，借助于电极振动，B4C颗粒可以对电极工作面电解产物进行磨削，保持电极工作面导电性能始终均匀一致，从而可以稳定高效地加工大深度和高表面质量的微型腔。以此为基础，详细研究了加工电压、B4C粉末浓度、振动频率、振幅和进给速度等参数对电解加工三维微型腔的影响规律，尤其是定量表征了三维叠层微电极台阶效应和微型腔加工表面质量，掌握了该方法的成形规律；聚焦研究了振动频率、振幅和进给速度等参数与三维叠层微电极台阶效应共同形成的特殊电解加工流场的旋涡效应及其对加工尺寸精度的影响，揭示了该方法的成形机理。.作为拓展研究，完成本项目主要研究任务之后，还针对相同微型腔的加工问题，运用相似的工艺手段探索了三维叠层微电极混粉电火花加工方法。

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