连续薄膜式变形镜是波前校正器的重要类型之一，具有镜面连续及填充率大等优点，非常适合应用于小口径高精度自适应光学系统，尤其在空间探测、激光修正、医学成像等领域，其研究一直是热点也是难点，微型化、高灵敏度和宽调谐范围是亟待解决的问题。本项目主要提出了一种基于压电微驱动器阵列的MEMS 连续薄膜式变形镜技术，通过利用PZT薄膜材料优良的d31和d33压电特性，设计平行平板（d31模式）和环形叉指（IDT模式）电级，构建单压电片鼓膜结构以获得大的驱动性能，从而克服一般连续薄膜式变形镜有效冲程小，镜面残余应力高等缺点。在此基础上，构建有限元模型，分析鼓膜形变力学成因，优化成膜工艺和器件结构，可进一步提高器件的驱动能力和稳定性，实现变形镜面低电场下的大应变和良好的频率响应特性。本项目着重于铁电薄膜与传统自适应光学和成熟的Si 半导体集成工艺的兼容性研究，为下一代空间自适应光学应用提供理论依据和技术支持

Continuous-membrane deformable mirror is one of the most important types of wavefront correctors, which has the advantages of high filling factors and continuous mirror surface, so it is very suitable for small diameter and high precision adaptive optics system, especially in the applications fields such as astronomical observation, laser shaping, retina imaging, etc. But how to achieve miniaturization, high-sensitivity and high frequency tuning range of DM is still the problem which needs to be solved immediately. In this project, we present a MEMS continuous-membrane deformable mirror based on PZT unimorph diaphragm microactuators for low-voltage AO. The actuators utilize a piezoelectric unimorph membrane structure (diaphragm) to improve actuating ability with the excellent d31 and d33 piezoelectric properties of PZT thin film by designing interdigitated electrodes (IDT-mode) or parallel plate electrodes (d31-mode) electrode structure, which can overcome the disadvantages of small effect stroke and high residual stress of common micromachined deformable mirrors. On this basis, finite element method (FEM) can be used to evaluate the intrinsic strain behaviors of unimorph diaphragm and optimize the film-fabricating process and device structure, in order to achieve large strokes at low voltage, high stability and excellent frequency response characteristics of DM. This project focuses on the compatibility study of ferroelectric thin films with conventional adaptive optics and Si semiconductor integration technology, in order to provide theoretical and technical supports for the next generation of space adaptive optics applications.