基于申请团队在硅基掺铒发光材料优化、器件设计、工艺制备、器件耦合封装、芯片测试等方面拥有的长期工作积累，本项目将研制面向规模集成的硅基高增益光波导放大器和和激光器。计划开展两大方面研究：(1)化学气相沉积方法制备高增益铒镱/钇硅酸盐化合物纳米线光波导放大器和激光器：研究高增益、低损耗的铒镱/钇硅酸盐化合物纳米线的生长机理，研究微纳尺寸的谐振腔对近红外光的单模激光激射的影响，获得单模激光激射；(2)微电子工艺制备硅基高增益光波导放大器和激光器：借鉴优化的高增益纳米线材料的组分和结构，研究硅基高增益光波导放大器薄膜的制备方法，研究低损耗的光波导放大器结构；研究不同DFB和DBR光栅结构参数对激光器的线宽、波长、输出功率的影响；采用标准的微电子工艺制备面向规模集成的硅基高增益光波导放大器和激光器,实现10dB/cm的增益，mW以上激光出光功率。

We will develop an integrated high gain silicon based optical waveguide amplifiers and lasers based on the long-term research in Er-doped silicon luminescent material optimization, device design, process preparation, device coupled package, and chip measurement. The two key technology as follows. (1) High gain Er-Yb/Y silicate compound nanowire waveguide amplifiers and lasers. Studying the growth mechanism of the high-gain, low-loss single-crystal Er-Yb/Y silicate compound nanowires, investigating the effect of micro-nano sized resonance cavity on a single-mode near-infrared laser, and obtaining a single-mode laser lasing. (2) Si based high gain optical waveguide amplifiers and lasers for the large scale integration. We will study the high gain Er-Yb/Y silicate compound film preparation method, and study the low-loss waveguide amplifier structure based on the optimized composition and structure of high gain nanowire material. We will investigate the effects of different DFB and DBR grating structure parameters on the laser linewidth, wavelength, and output power. We will prepare a Si based high gain optical waveguide amplifiers using standard microelectronic process.