高熵合金薄膜材料具有许多优异的物理和化学性能，而且相对于块体高熵合金材料可以有效地降低工业使用成本。将其沉积在关键的微电子和微机械器件上，可以显著地增加器件的表面硬度、耐磨性和耐蚀性，提高其使用寿命。然而，目前对于具有优异性能的高熵合金薄膜成分的快速高效筛选及其与基体的界面结合研究较少，且对其在加载环境下的微观变形机理尚不清楚，使其在工业上的广泛应用受到一定限制。本项目意在通过多靶共溅射高通量制备技术获得具有成分梯度分布的高熵合金薄膜，通过多点分布式纳米压痕测试薄膜性能，快速高效地筛选出性能优异的高熵合金薄膜成分，并研究薄膜与基体的界面结合问题；之后通过聚焦离子束技术在高熵合金薄膜表面制备出微纳米尺度样品，并利用原位扫描和原位透射技术对薄膜样品在加载环境下的微观塑性变形行为进行实时和系统的研究，建立起相应的微观变形机理模型，为高熵合金薄膜在工业上的应用提供理论基础和技术指导。

High-entropy alloy thin films (HEATFs) show many excellent physical and chemical properties, and compared with the bulk high-entropy alloys (HEAs), the cost of the HEATFs can be effectively reduced. They can be deposited on the micro-electro-mechanical devices and enhance their surface hardness, wear resistance and corrosion resistance, hence improve their service life. However, little work has been done on the optimization of the HEATFs' composition and the investigation of the interface with the substrate. Furthermore, the plastic deformation mechanism of the HEATFs under loading is still unclear, which greatly restricts the HEATFs' extensive industrial applications. In this proposal, the HEATFs with multiple concentration gradients will be synthesized by combinatorial sputtering technique. And a high-throughput strategy will be applied to characterize the HEATFs' mechanical properties through parallel nanoindentation tests. Using this approach, the optimum composition of the HEATFs with excellent mechanical properties will be identified from the complex composition systems rapidly and efficiently. Then the interface between the HEATFs and the substrates will be studied. After that focus ion beams will be used to prepare nanopillars and T-shape samples on the HEATFs' surface, and their micromechanical properties will be studied by in situ scanning electronic microscopy and in situ transmission electronic microscopy systematically. Based on the real time experimental results, a reliable model will be built to explain the plastic deformation mechanism of the HEATFs, which would provide theoretical basis and technical guidance for their industrial applications.