金属玻璃微细电解线切割加工技术研究

The metallic glasses pose great and wide potential in the miniaturization and precise treatment of various products, due to its outstanding properties. However, the micro processing technologies of metallic glasses are not yet mature, to a certain extent hindered its wide application. The crystallization of metallic glasses in the machining process poses a great challenge to existing processing techniques in case of impairing its properties. Micro wire electrochemical machining, in which process the materials are removed by anodic dissolutions at a low temperature, proposes an ideal way to process metallic glasses, without producing stresses and crystallization. This project will systematically study the machining characteristics of metallic glasses utilizing micro wire electrochemical machining. The electrochemical dissolving mechanism and characteristics of metallic glasses will be investigated. The distribution of front and side machining gap would be revealed by proposed “Kerf Electrodeposition” method. In order to removing the electrolytic products out of the narrow machining gap, a method for enhancing the mass transport during micro wire electrochemical machining is put forward with linear reciprocating motion of the workpiece. Moreover, the situ fabrication of sub-micro and nano wire electrode made out of metallic glasses by vertical liquid membrance electrochemical etching will be carried out. Micro wire electrochemical machining at sub-micrometer and nanometer scale will be studied either. The effects of various factors on the machining accuracy of micro wire electrochemical machining of metallic glasses will be researched. Finally, micro structures of metallic glasses with high quality can be fabricated by wire electrochemical machining. This project will provide an efficient micro fabrication method of metallic glasses and promote its engineering application.

金属玻璃具有优异的材料性能，在产品微小型化、精密化方面已展现出重要和广阔的应用前景。但是，金属玻璃微加工技术还不成熟，在一定程度上阻碍了其广泛应用。防止材料在加工过程中发生晶化，避免其优越性能的丢失，是对各种加工技术的挑战。微细电解线切割基于电化学阳极溶解原理对材料进行加工，加工温度低，没有加工应力，材料不会晶化，是制造金属玻璃微结构零件理想的技术手段。本项目将系统研究金属玻璃微细电解线切割加工技术，揭示金属玻璃的电化学溶解机理和特性；提出“切缝电沉积填充法”测量加工间隙，揭示金属玻璃微细电解线切割加工端面及法向加工间隙分布规律；提出工件往复运动强化传质措施，解决加工金属玻璃时产物排出难题；提出竖直液膜电化学腐蚀法制备亚微米/纳米尺度金属玻璃线电极，探索亚微米/纳米微细电解线切割加工；掌握金属玻璃微细电解线切割加工工艺规律，实现金属玻璃微结构的高品质加工，丰富其微加工手段，推动其工程应用。

金属玻璃具有优异的物理化学性能，为新型航空机载设备和武器系统提供了性能优良的材料，其微型零部件成型时，不仅要满足加工质量，还要防止材料晶化，是对各种制造技术的巨大挑战，微细电解线切割技术是制造金属玻璃微型结构的一种理想技术手段。本项目系统性的研究了金属玻璃微细电解线切割加工技术，重点揭示了微缝间隙分布规律，依托电解加工机理，结合“切缝电沉积填充法”推导并修正了微缝端面间隙与侧面间隙以及加工参数之间的关系模型，突破微细电解线切割间隙的可视化测量、数学物理模型的理论推导等关键问题，完成金属玻璃微细电解线切割间隙分布规律的探索。分析了金属玻璃的电化学溶解机理，根据材料电化学特性与电解加工之间的联系，提出了碳纳米管纤维线电极运丝微细电解加工方法，采用亲水碳纳米纤维作为线电极，加强线电极对间隙内产物的拖拽效果，同时提出了工件往复运动加强传质效果，解决了加工金属玻璃时产物排除难题。针对零部件的进一步微型化，提出了竖直液膜电化学腐蚀法制备亚微尺度电极，实现了亚微米微细电解线切割加工。本项目掌握了金属玻璃微细电解线切割加工工艺规律，丰富和完善了微细电解线切割加工的理论与技术体系，提升了其工艺能力，为金属玻璃材料高新技术产品的研制提供了重要的技术支撑。.已发表学术论文18篇，其中SCI源期刊12篇；授权国家发明专利13项；已毕业博士研究生3名，在读博士研究生1名，已毕业硕士研究生6名。

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